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  4. Film thickness meter Laser type ellipsometer (Miwa Opto Co., Ltd.)
Film thickness meter Laser type ellipsometer-LSE
Film thickness meter Laser type ellipsometer-Miwa Opto Co., Ltd.

Film thickness meter Laser type ellipsometer
Miwa Opto Co., Ltd.

About This Product

■About laser ellipsometer

Our company has maintained a partnership with Gartna Scientific since before the company was established. We have delivered over 2,100 sets worldwide and over 500 sets in Japan. By adopting the Stokes method, high-speed measurement, high precision, and high reproducibility are achieved. In addition, there are no moving parts during measurement, making it maintenance-free.

■Features

・Single wavelength Stokes type ellipsometer He-Ne laser λ=632.8nm ・Multi-wavelength Stokes type ellipsometer 1 to 2 wavelengths can be added in addition to the He-Ne laser. Also compatible with wavelengths other than 375, 405, 488, 544, and 830nm

■Options

・Auto Stage (WS) ・Autofocus (AF) ・Auto tilt (AT) ・Wafer automatic transport (WH) ・Micro spot (MS) ・Maximum sample stage is 20 inches; even larger diameters are also possible. ・Various safety measures ・Standard thickness wafer (STD) ・Software development in Japan

■About upgrade

・It is possible to change the control controller from the old type to the current controller. ・It is also possible to upgrade from manual stage to automatic stage. - Upgrade to autofocus & autotilt is also possible.

  • Product

    Film thickness meter Laser type ellipsometer

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1 Models of Film thickness meter Laser type ellipsometer

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Film thickness meter Laser type ellipsometer-Part Number-LSE

LSE

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Miwa Opto Co., Ltd.

  • Japan

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