Film thickness meter Laser type ellipsometer
Miwa Opto Co., Ltd.
About This Product
■About laser ellipsometer
Our company has maintained a partnership with Gartna Scientific since before the company was established. We have delivered over 2,100 sets worldwide and over 500 sets in Japan.
By adopting the Stokes method, high-speed measurement, high precision, and high reproducibility are achieved. In addition, there are no moving parts during measurement, making it maintenance-free.
■Features
・Single wavelength Stokes type ellipsometer He-Ne laser λ=632.8nm
・Multi-wavelength Stokes type ellipsometer 1 to 2 wavelengths can be added in addition to the He-Ne laser. Also compatible with wavelengths other than 375, 405, 488, 544, and 830nm
■Options
・Auto Stage (WS)
・Autofocus (AF)
・Auto tilt (AT)
・Wafer automatic transport (WH)
・Micro spot (MS)
・Maximum sample stage is 20 inches; even larger diameters are also possible.
・Various safety measures
・Standard thickness wafer (STD)
・Software development in Japan
■About upgrade
・It is possible to change the control controller from the old type to the current controller.
・It is also possible to upgrade from manual stage to automatic stage.
- Upgrade to autofocus & autotilt is also possible.
-
Product
Film thickness meter Laser type ellipsometer
-
Handling Company
Miwa Opto Co., Ltd.
-
Categories
1 Models of Film thickness meter Laser type ellipsometer
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
|
|
LSE |
Available upon quote |
Customers who viewed this product also viewed
Other products of Miwa Opto Co., Ltd.
View more products of Miwa Opto Co., Ltd.
About Company Handling This Product
- Japan