Automatic ellipsometer system LM series
Miwa Opto Co., Ltd.
About This Product
■Summary
Gartna's ellipsometer has shipped over 2,500 units worldwide, and there are over 550 units in Japan. This system provides the Stokes method and various measurement types.
■Features
・Since the L series is equipped with autofocus and autotilt as standard, it is compatible with next-generation process lines. Therefore, it achieves even higher precision and reproducibility, achieving higher reliability.
・Automation compatible system.
・The L&S series is compatible with automation and supports up to 300mm.
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Product
Automatic ellipsometer system LM series
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Handling Company
Miwa Opto Co., Ltd.
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Categories
1 Models of Automatic ellipsometer system LM series
| Product Image | Part Number | Price (excluding tax) |
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Automatic ellipsometer system LM series |
Available upon quote |
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About Company Handling This Product
- Japan