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Automatic ellipsometer system LM series-Automatic ellipsometer system LM series
Automatic ellipsometer system LM series-Miwa Opto Co., Ltd.

Automatic ellipsometer system LM series
Miwa Opto Co., Ltd.


About This Product

■Summary

Gartna's ellipsometer has shipped over 2,500 units worldwide, and there are over 550 units in Japan. This system provides the Stokes method and various measurement types.

■Features

・Since the L series is equipped with autofocus and autotilt as standard, it is compatible with next-generation process lines. Therefore, it achieves even higher precision and reproducibility, achieving higher reliability. ・Automation compatible system. ・The L&S series is compatible with automation and supports up to 300mm.

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    Automatic ellipsometer system LM series

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1 Models of Automatic ellipsometer system LM series

Image Part Number Price (excluding tax)
Automatic ellipsometer system LM series-Part Number-Automatic ellipsometer system LM series

Automatic ellipsometer system LM series

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