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Special robotHandling Company
Shibaura Machine| Image | Part Number | Price (excluding tax) | Drive method | Load Maximum payload | Maximum speed 4th axis (Z-axis rotation) | Maximum speed 3rd axis (Z axis) | Maximum speed 2nd axis | Maximum speed 1st axis | Operating range 4th axis (Z-axis rotation) | Operating range 3rd axis (Z axis) | Operating range 2nd axis | Operating range 1st axis | Position repeatability Z-axis (up and down) | Position repeatability X, Y (plane) | Position repeatability 4 axes (Z-axis rotation) | Position detection method | Attached cable | Robot body mass | Robot body paint color | Input/output signals for hand | Controller | Cleanliness | Arm length 2nd arm | Arm length 1st arm |
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Wafer transfer SR-404HC |
Available upon quote |
All-axis AC servo motor |
20 kg (including hand) |
240 deg/s |
200mm/s |
240 deg/s |
274 deg/s |
±230 degrees |
100mm |
±160 degrees |
±230 degrees |
±0.05 mm |
±0.05 mm |
±0.1 degree |
Absolute method |
Standard 5 m (maximum 30 m) |
200 kg |
Misty white |
5 input points, 2 output points |
TS3000 |
Class 100 (particle size 0.3 μm) |
200mm |
200mm |
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