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  3. Plasma Processing Equipment
  4. Plasma products Multi-stage parallel plate type reduced pressure plasma equipment (Denshi Giken Co., Ltd.)
Plasma products Multi-stage parallel plate type reduced pressure plasma equipment-Multi-stage parallel plate type reduced pressure plasma device
Plasma products Multi-stage parallel plate type reduced pressure plasma equipment-Denshi Giken Co., Ltd.

Plasma products Multi-stage parallel plate type reduced pressure plasma equipment
Denshi Giken Co., Ltd.

About This Product

■Summary

We have developed a plasma processing device that can batch process glass substrates, printed circuit boards, etc. by installing multiple electrodes/stages in the processing chamber. In addition, this machine can perform plasma processing with one high-frequency power supply, matching control device, main valve, vacuum pump, and chiller. Footprint is also reduced. This is a batch type plasma processing equipment developed for surface modification, cleaning, sintering, rough ashing, and desmear processing.

■Features

・Suitable for processing medium-sized substrates, films, etc. ・Achieved low costs by minimizing peripheral equipment such as high-frequency power supplies, vacuum equipment such as pumps, and chillers. ・Main configuration: Chamber 1ch (stage/electrode 2~4SET) ・High frequency power supply/matching unit 1SET ・Main valve 1SET ・Dry vacuum pump 1SET ・Chiller 1SET ・Gas control unit 1SET, control panel 1SET ・Small footprint due to multi-stage processing stage configuration ・Various process applications such as surface modification, sintering, desmearing, etc. using RIE mode. (Please contact us separately for PE mode)

■Application examples

・Resist ashing ・Desmear/descum processing ・Organic matter removal ・Low temperature sintering ・Various functional group modifications Surface modification treatment (hydrophilic/water repellent/improved adhesion/reduction) ・Pre-plating treatment for various substrates such as fluororesin ・Adhesive-free bonding pretreatment for various substrates such as fluororesin

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    Plasma products Multi-stage parallel plate type reduced pressure plasma equipment

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1 Models of Plasma products Multi-stage parallel plate type reduced pressure plasma equipment

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Plasma products Multi-stage parallel plate type reduced pressure plasma equipment-Part Number-Multi-stage parallel plate type reduced pressure plasma device

Multi-stage parallel plate type reduced pressure plasma device

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About Company Handling This Product

Denshi Giken Co., Ltd.

  • Japan

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