Plasma products Multi-stage parallel plate type reduced pressure plasma equipment
Denshi Giken Co., Ltd.
About This Product
■Summary
We have developed a plasma processing device that can batch process glass substrates, printed circuit boards, etc. by installing multiple electrodes/stages in the processing chamber. In addition, this machine can perform plasma processing with one high-frequency power supply, matching control device, main valve, vacuum pump, and chiller. Footprint is also reduced. This is a batch type plasma processing equipment developed for surface modification, cleaning, sintering, rough ashing, and desmear processing.
■Features
・Suitable for processing medium-sized substrates, films, etc.
・Achieved low costs by minimizing peripheral equipment such as high-frequency power supplies, vacuum equipment such as pumps, and chillers.
・Main configuration: Chamber 1ch (stage/electrode 2~4SET)
・High frequency power supply/matching unit 1SET
・Main valve 1SET
・Dry vacuum pump 1SET
・Chiller 1SET
・Gas control unit 1SET, control panel 1SET
・Small footprint due to multi-stage processing stage configuration
・Various process applications such as surface modification, sintering, desmearing, etc. using RIE mode. (Please contact us separately for PE mode)
■Application examples
・Resist ashing
・Desmear/descum processing
・Organic matter removal
・Low temperature sintering
・Various functional group modifications Surface modification treatment (hydrophilic/water repellent/improved adhesion/reduction)
・Pre-plating treatment for various substrates such as fluororesin
・Adhesive-free bonding pretreatment for various substrates such as fluororesin
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Product
Plasma products Multi-stage parallel plate type reduced pressure plasma equipment
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Handling Company
Denshi Giken Co., Ltd.
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Categories
1 Models of Plasma products Multi-stage parallel plate type reduced pressure plasma equipment
| Product Image | Part Number | Price (excluding tax) |
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Multi-stage parallel plate type reduced pressure plasma device |
Available upon quote |
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About Company Handling This Product
- Japan