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  4. Plasma products Barrel type reduced pressure plasma processing equipment PB Series (Denshi Giken Co., Ltd.)
Plasma products Barrel type reduced pressure plasma processing equipment PB Series-PB Series
Plasma products Barrel type reduced pressure plasma processing equipment PB Series-Denshi Giken Co., Ltd.

Plasma products Barrel type reduced pressure plasma processing equipment PB Series
Denshi Giken Co., Ltd.

About This Product

■Summary

This is a low-cost batch processing plasma processing equipment. Because it is an isotropic plasma, samples can be processed from all directions. It is used for resist ashing on up to 50 semiconductor wafers, bulk cleaning of electronic components, and surface modification such as making various materials hydrophilic/water repellent.

■Features

・Isotropic plasma allows processing regardless of the shape of the object. ・Processing chamber size and RF output specifications can be customized according to the application. ・Touch panel operation. AUTO/MANUAL mode switching. ・Small footprint. - Reduced damage by installing optional aluminum tunnel.

■Application examples

・Resist ashing / insulation film etching ・Bump pretreatment / UBM plating pretreatment / Lead frame cleaning ・Surface modification of nanocarbon particles, metals, resins, etc. (hydrophilic/water repellent/reduction) ・Improved compatibility with porous artificial bone ・Precision mold cleaning/organic matter removal ・Sterilization

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    Plasma products Barrel type reduced pressure plasma processing equipment PB Series

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1 Models of Plasma products Barrel type reduced pressure plasma processing equipment PB Series

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Plasma products Barrel type reduced pressure plasma processing equipment PB Series-Part Number-PB Series

PB Series

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Denshi Giken Co., Ltd.

  • Japan

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