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Spectroscopic ellipsometer SE-2000 (rotating compensator type)-SE-2000
Spectroscopic ellipsometer SE-2000 (rotating compensator type)-Japan Semi-Lab Co., Ltd.

Spectroscopic ellipsometer SE-2000 (rotating compensator type)
Japan Semi-Lab Co., Ltd.


About This Product

■What is the spectroscopic ellipsometer SE-2000?

Since the days of Sopra, the pioneer of ellipsometers, we have sold numerous spectroscopic ellipsometers. The new product, the Ellipsometer SE-2000, inherits the experience and technology cultivated in the previous model of our best-selling spectroscopic ellipsometer, and has been improved based on numerous customer feedback, resulting in higher measurement accuracy and operability than previous models. We have achieved stability and stability. In addition to improved measurement accuracy due to the rotating compensator type, easy-to-use analysis software and extensive database make it useful for a variety of purposes, from research and development to inline production quality control.

■Rotating compensator type spectroscopic ellipsometer

There are various measurement methods for ellipsometers, but the spectroscopic ellipsometer SE-2000 uses the latest rotating compensator type for high-precision measurements. With various measurement methods that do not use a compensator, unavoidable measurement errors occur near the measurement data Δ=0, which can lead to incorrect analysis results. The rotating compensator type can measure with high precision even around Δ=0, so accurate analysis results can be obtained. Therefore, users can use the device with confidence without worrying about error factors due to measurement methods.

■Covering the spectral range from deep ultraviolet to mid-infrared

The SE-2000 spectroscopic ellipsometer has a unique layout in which an optional FTIR ellipsometer head is mounted on the same goniometer with a visible arm, allowing it to cover the widest spectral range from deep ultraviolet to mid-infrared in a single instrument.

■High-speed measurement mode and high-resolution mode

As for the device configuration, it is also possible to select high-speed measurement mode and high-resolution mode, or both modes in the same device.

■Latest analysis software

The SE-2000 spectroscopic ellipsometer is equipped with new high-performance electronics and operates with a new generation of operating and analysis software. The latest analysis-specific software is equipped with a rich database of NK values ​​and optical models, and the latest GUI allows for visual optimization of parameter initial values, making it possible to combine multiple optical models. This makes it possible to approach even difficult analyses.

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    Spectroscopic ellipsometer SE-2000 (rotating compensator type)

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1 Models of Spectroscopic ellipsometer SE-2000 (rotating compensator type)

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Spectroscopic ellipsometer SE-2000 (rotating compensator type)-Part Number-SE-2000

SE-2000

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