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  4. Vacuum pump Turbo molecular pump series Magnetic bearing type composite molecular pump (TG-M series) (Atotech Co., Ltd.)
Vacuum pump Turbo molecular pump series Magnetic bearing type composite molecular pump (TG-M series)-Complex molecular pump (TG-M series)
Vacuum pump Turbo molecular pump series Magnetic bearing type composite molecular pump (TG-M series)-Atotech Co., Ltd.

Vacuum pump Turbo molecular pump series Magnetic bearing type composite molecular pump (TG-M series)
Atotech Co., Ltd.

About This Product

■Summary

- In the 2,000 to 3,400 L/s class, in addition to the standard type, a large flow rate type is also available. (Chemical form available) ・TG1121M with extremely high vacuum specifications is also available. ・Insulation structure specifications are also available as special specifications. Can be used for long periods even in processes where reaction products accumulate.

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    Vacuum pump Turbo molecular pump series Magnetic bearing type composite molecular pump (TG-M series)

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1 Models of Vacuum pump Turbo molecular pump series Magnetic bearing type composite molecular pump (TG-M series)

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Vacuum pump Turbo molecular pump series Magnetic bearing type composite molecular pump (TG-M series)-Part Number-Complex molecular pump (TG-M series)

Complex molecular pump (TG-M series)

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Atotech Co., Ltd.

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