Vacuum Pump Turbo Molecular Pump Series Magnetic Bearing Type Complex Molecular Pump (TG-M Series)/Full Digital Type
Atotech Co., Ltd.
About This Product
■Summary
・Lineup ranges from 300 to 2,400L/s.
・Vibration is significantly reduced by adopting a full digital controller.
- Model coupling is free, so all models in the series can be operated with the same controller.
*Auto calibration (automatic sensor adjustment)
- Rotation speed can be changed to achieve exhaust performance according to the process.
・Special specifications include insulation structure specifications, allowing long-term use even in processes where reaction products accumulate.
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Product
Vacuum Pump Turbo Molecular Pump Series Magnetic Bearing Type Complex Molecular Pump (TG-M Series)/Full Digital Type
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Handling Company
Atotech Co., Ltd.
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Categories
1 Models of Vacuum Pump Turbo Molecular Pump Series Magnetic Bearing Type Complex Molecular Pump (TG-M Series)/Full Digital Type
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
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Complex molecular pump (TG-M series)/Full digital type |
Available upon quote |
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About Company Handling This Product
- Japan