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Phase shifter-PSC-2Ⅲ
Phase shifter-Shinden Kogyo Co., Ltd.

About This Product

■Features

・Fully autonomous driving ・Digital phase difference display ・Equipped with remote signal ・13.56MHz

■Overview

This automatic phase shifter automatically adjusts the phase difference between the plasma electrode, which is the reference for a system that operates multiple power supplies synchronously in auto mode, and the RF power supply for other electrodes to a constant value. The RF probe, which extracts a portion of the electrode voltage, is usually attached to a matching box, and its output is fed back to the device. This device can set the phase difference from 0° to ±180° using the potentiometer on the front panel or a remote signal. This unit displays the phase difference using the digital meter on the front panel and outputs it as an analog signal. It can also be used in manual mode, in which case no feedback signal from the RF probe is required. PSC-2Ⅲ is used for dual power system and PSC-n is used for n power system.

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    Phase shifter

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1 Models of Phase shifter

Image Part Number Price (excluding tax) Required power supply Outer diameter dimension Frequency Variable phase range Remote signal (phase difference setting input) Remote signal (phase difference monitor output) RF output RF input Mode switching
Phase shifter-Part Number-PSC-2Ⅲ

PSC-2Ⅲ

Available upon quote

AC85~132V, 1A

215W×330D×99H

13.56MHz±0.01%

0°±180°

0~2.5~5V/+180°~0°~-180°

-1.8~+1.8V/-180~+180°

TTL level or sine wave output
3±0.5Vrms (7.07~9.9Vp-/50Ω)

Input level = 0.3~3Vrms/50Ω
(Feedback signal) (0.85~28.3Vp-p/50Ω)

Auto/Manual selector switch (on front panel)

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