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  4. Single Langmuir probe LPM series (Arios Co., Ltd.)
Single Langmuir probe LPM series-LPM-100S
Single Langmuir probe LPM series-Arios Co., Ltd.

Single Langmuir probe LPM series
Arios Co., Ltd.

Arios Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

0.9hours

Very Fast Response

About This Product

■Summary

The Langmuir probe method is one of the simple methods for plasma diagnosis (measurement). Diagnose plasma electron temperature and plasma density by inserting a probe into plasma, measuring and analyzing its voltage-current characteristics, and obtaining plasma parameters. The LPM series is a single-needle Langmuir probe type plasma measurement unit, and has the most basic shape. By controlling a commercially available 4-quadrant power supply using dedicated processing software and automating the process, we aim to maximize the convenience of electron temperature and plasma density measurements. We will decide on the probe shape and specifications based on the usage environment, such as what kind of equipment and conditions you are considering for plasma diagnosis, so please feel free to contact us.

■Features

・High-speed measurement is possible with dedicated processing software, and it can also be used in film deposition equipment. - Can be moved in a straight line within a vacuum container. (O-ring shaft seal type) - Stroke etc. can be selected according to the device to be installed. - Lineup includes bendable types with joints. The tip can be bent as desired. ・Alumina tube and probe can be easily replaced. ・It is possible to use a commercially available 4-quadrant power supply. - Flexible types with rotation mechanisms are also available, allowing measurement over a wider range. ・A filter is available for RF noise countermeasures. (Optional) ・Automatic drive type with motor is also available. (Optional)

■Automatic measurement configuration

・Single Langmuir probe ・Source measure unit (recommended power supply) ・Processing software LMP-100SCAN + PC, GPIB controller

■Automatic measurement configuration (automatic drive control) (optional configuration)

・Single Langmuir probe + controller power supply ・Source measure unit (recommended power supply) ・Processing software LMP-100SCAN + PC, GPIB controller

■Compatible power supply

Yokogawa Electric TM GS610 Voltage current range ±110V.±500mA

  • Product

    Single Langmuir probe LPM series

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1 Models of Single Langmuir probe LPM series

Image Part Number Price (excluding tax) Minimum insertion length Connection flange Insertion stroke Storage container Probe material Probe diameter Connector Cable
Single Langmuir probe LPM series-Part Number-LPM-100S

LPM-100S

Available upon quote

50~200mm

Φ70CF (standard)

50~500mm (standard 200mm) *Please contact us for sizes over 500mm.

Acrylic storage containers

Tungsten

Φ1.5mm (standard)

BNC

3m

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About Company Handling This Product

Arios Co., Ltd.

Response Rate

100.0%

Response Time

0.9hrs

  • Japan

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