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  4. XYZ stage (Arios Co., Ltd.)
XYZ stage-XYZ70114-50
XYZ stage-Arios Co., Ltd.

XYZ stage
Arios Co., Ltd.

Arios Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

1.7hours

Very Fast Response

About This Product

■Summary

This is a hollow XYZ stage where the offset of each axis center and the distance between the two flanges can be varied. The difference from the simple XY mechanism (SXY series) is that it is equipped with a micrometer, allowing precise position adjustment. The 3-axis movement mechanism makes it ideal for adjusting the position of sample holders, sample heating mechanisms, various introducers, and other components.

■Features

- Baking is possible due to the all-metal seal conflat flange specification. ・Ideal for various ultra-high vacuum devices such as MBE devices and surface analysis devices. - Compatible with φ70CF to φ203CF. - X-Y movement is precision movement using a micrometer head and cross roller bearings. ・Multi-axis motion can be transmitted into the vacuum by combining with a transfer rod, rotation introduction machine, linear introduction machine, etc.

■Options

-SD MitutoyoTM digital scale

  • Product

    XYZ stage

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1 Models of XYZ stage

Image Part Number Price (excluding tax) Material Minimum inner diameter Leak amount Baking temperature Bellows inner diameter Flange 2 Flange 1 Stroke amount (z) Stroke amount
XYZ stage-Part Number-XYZ70114-50

XYZ70114-50

Available upon quote

Bellows part - SUS 316, Others - SUS 304

Φ38mm

6.7×10^-11 Pa・m^3/sec or less

Maximum 200℃

Φ50

Φ114

Φ70

50mm

X-Y each ±10mm

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About Company Handling This Product

Arios Co., Ltd.

Response Rate

100.0%

Response Time

1.7hrs

  • Japan

Related search keywords

XYZ Vacuum Stages
XYZ Vacuum Stages　Arios Co., Ltd.
Arios Co., Ltd.

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