XYZ stage
Arios Co., Ltd.
About This Product
■Summary
This is a hollow XYZ stage where the offset of each axis center and the distance between the two flanges can be varied. The difference from the simple XY mechanism (SXY series) is that it is equipped with a micrometer, allowing precise position adjustment. The 3-axis movement mechanism makes it ideal for adjusting the position of sample holders, sample heating mechanisms, various introducers, and other components.
■Features
- Baking is possible due to the all-metal seal conflat flange specification.
・Ideal for various ultra-high vacuum devices such as MBE devices and surface analysis devices.
- Compatible with φ70CF to φ203CF.
- X-Y movement is precision movement using a micrometer head and cross roller bearings.
・Multi-axis motion can be transmitted into the vacuum by combining with a transfer rod, rotation introduction machine, linear introduction machine, etc.
■Options
-SD MitutoyoTM digital scale
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Product
XYZ stage
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Handling Company
Arios Co., Ltd.
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Categories
1 Models of XYZ stage
| Product Image | Part Number | Price (excluding tax) | Baking temperature | Bellows inner diameter | Flange 1 | Flange 2 | Leak amount | Material | Minimum inner diameter | Stroke amount | Stroke amount (z) |
|---|---|---|---|---|---|---|---|---|---|---|---|
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XYZ70114-50 |
Available upon quote | Maximum 200℃ | Φ50 | Φ70 | Φ114 | 6.7×10^-11 Pa・m^3/sec or less | Bellows part - SUS 316, Others - SUS 304 | Φ38mm | X-Y each ±10mm | 50mm |
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About Company Handling This Product
- Japan