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Simple XY mechanism SXY series-SXY70070
Simple XY mechanism SXY series-Arios Co., Ltd.

Simple XY mechanism SXY series
Arios Co., Ltd.


About This Product

■Summary

This is a part that allows offset of the center of each axis and angle adjustment of ±3° between the two flanges. This machine combines a simple XY mechanism with a tilt adjustment mechanism. Adjustments can be made on the atmospheric side. Ideal for adjusting the position of transfer rods, and because of its all-metal sealed structure, it can also be used in ultra-high vacuum equipment. The angle of this SXY series can be adjusted, but since it is not equipped with a micrometer, please use an XYZ stage for precise position adjustment.

■Features

- Baking is possible due to the all-metal seal conflat flange specification. ・Ideal for various ultra-high vacuum devices such as MBE devices and surface analysis devices. - Compatible with φ70 to φ203CF. -Tilt adjustment is possible by adjusting the 4 rods. - By combining with transfer rods, ultra-compact rotary introduction machines, linear introduction machines, etc., multi-axis motion transmission into the vacuum can be performed economically.

  • Product

    Simple XY mechanism SXY series

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1 Models of Simple XY mechanism SXY series

Image Part Number Price (excluding tax) Mass (g) Amount of movement Material Leak amount Baking temperature Bellows dimensions (φinner diameter/φouter diameter) (mm) Flange 2 Flange 1 Tilt
Simple XY mechanism SXY series-Part Number-SXY70070

SXY70070

Available upon quote

2,100

X-Y-Z each ±5mm

Bellows - SUS 316, Others - SUS 304

6.7×10^-11 Pa・m^3/sec or less

Maximum 200℃

39/51

Φ70CF

Φ70
*Can be changed to a rotating flange.

±3°

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