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  2. Load lock hatch ED series (Arios Co., Ltd.)
Load lock hatch ED series-ED 114V
Load lock hatch ED series-Arios Co., Ltd.

Load lock hatch ED series
Arios Co., Ltd.

Arios Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

1.7hours

Very Fast Response

About This Product

■Summary

The ED series is a load lock door used to introduce samples etc. into a vacuum system. This is an open-type lid that is used for inserting hands or tools to adjust the equipment, such as loading and unloading items with the vacuum container open to the atmosphere, or attaching samples to the vacuum container. This device does not require any tools and is fixed using a manual knob. If you do not have this device, you will have to open the flange with a tool, which is time-consuming and requires replacing the gasket. However, since O-rings are used, the ultimate vacuum may be lower than flanges that use metal gaskets. It is not recommended for use in the deposition chamber of molecular beam epitaxy equipment (MBE). In this case, we recommend using a load-lock chamber for sample removal.

■Features

- Small and lightweight design allows installation anywhere. - Compatible with high vacuum due to fluororubber seal. ・Can be baked up to 150℃. ・Can be directly attached to φ114 to φ305CF. - Various sizes are available with and without windows, and window materials such as quartz glass can be selected as options. ・We can also manufacture JIS flanges and special flange shapes.

  • Product

    Load lock hatch ED series

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1 Models of Load lock hatch ED series

Image Part Number Price (excluding tax) Opening diameter (mm) Mass (g) Allowable heating temperature Window material Effective diameter (mm) Leak amount Flange Seal material
Load lock hatch ED series-Part Number-ED 114V

ED 114V

Available upon quote

Φ64

1060

Maximum 150℃

TempaxTM (standard product), quartz (optional)

Φ30

1.3×10^-8 Pa・m^3/sec or less

Φ114CF

Fluororubber (hatches, windows)

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About Company Handling This Product

Arios Co., Ltd.

Response Rate

100.0%

Response Time

1.7hrs

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