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  1. Metoree
  2. Viewport shutter SF series (Arios Co., Ltd.)
Viewport shutter SF series-SF70
Viewport shutter SF series-Arios Co., Ltd.

Viewport shutter SF series
Arios Co., Ltd.

Arios Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

1.7hours

Very Fast Response

About This Product

■Summary

Prevents film formation and damage to the viewport, which is a problem during film formation processes such as evaporation, sputtering, MBE, and CVD, and processes that involve organic gas. Vacuum containers are usually made of stainless steel, so you cannot see inside. To see inside, use a viewing window called a viewport. However, during processes such as film formation, the film adheres to the view port, making it impossible to see inside the vacuum vessel. To remove the adhered film, scrape it off after exposing it to the atmosphere, and in some cases use chemicals. If the membrane is more rigid and cannot be removed, the viewport may need to be replaced. Therefore, a viewport shutter like this one is installed and closed when not observing to prevent film from forming on the viewport.

■Features

・With the conflat flange specification, it can be used in various ultra-high vacuum equipment such as MBE equipment. ・The rotating introduction machine also uses the RFT series, which is compatible with 200℃ baking, and is capable of high-temperature baking. - Compatible with φ70CF to φ203CF. ・It can be closed with almost no gaps and is effective even for samples with high vapor pressure. ・Optional shield glass and RHEED screen can be installed. ・You can change the opening/closing direction with a simple rearrangement. ・Special size flanges can also be manufactured. Please consult us.

  • Product

    Viewport shutter SF series

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1 Models of Viewport shutter SF series

Image Part Number Price (excluding tax) Mass (g) Mounting flange Rotating introduction machine used Main material Leak amount Baking temperature
Viewport shutter SF series-Part Number-SF70

SF70

Available upon quote

650

Φ70CF

RFT34B-VP (magnetic coupling)

SUS 304

6.7×10^-11 Pa・m^3/sec or less

200℃

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About Company Handling This Product

Arios Co., Ltd.

Response Rate

100.0%

Response Time

1.7hrs

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