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  2. Exhaust set MVPS (Arios Co., Ltd.)
Exhaust set MVPS-MVPS
Exhaust set MVPS-Arios Co., Ltd.

Exhaust set MVPS
Arios Co., Ltd.

Arios Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

1.7hours

Very Fast Response

About This Product

■Summary

This unit is a mobile exhaust set equipped with a turbo molecular pump and a roughing pump. With this one set, you can bring a vacuum container from atmospheric air to high vacuum. Since a scroll pump is used as an auxiliary pump, it is oil-free as standard, allowing clean exhaust without oil contamination inside the vacuum chamber.

■Features

- High maintainability due to simple configuration. ・You can freely choose the manufacturer of the turbo molecular pump and roughing pump. ・Easy startup with exhaust controller. (Program operation by sequencer) - Check back pressure using thermocouple vacuum gauge. ・Safe design with a breaker included as standard equipment. ・Can be operated using electricity alone when used in conjunction with an interlock valve (ILV-01).

■Options

・Ionization vacuum gauge ・Magnetic levitation turbo molecular pump ・Rotary pump ・Interlock valve (ILV-01) ・Various interlocks

  • Product

    Exhaust set MVPS

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1 Models of Exhaust set MVPS

Image Part Number Price (excluding tax) Power supply Weight Size Safety measures External output Compressed air Control method Turbomolecular pump pumping speed Turbomolecular pump control power supply Turbomolecular pump ultimate pressure Scroll pump motor output Scroll pump pumping speed Scroll pump ultimate pressure
Exhaust set MVPS-Part Number-MVPS

MVPS

Available upon quote

Single phase 200V/15A (max)

Approximately 60kg

Main body (530mm×650mm H1,200mm)

Prevention of overcurrent with circuit protector,
Prevention of motor overload operation by thermal relay,
Preventing damage to turbomolecular pumps and scroll pumps through condition monitoring

Baking enable signal via relay contact

Pressure 0.4~0.6 MPa (Connection diameter: Rc 1/4 (when used))

Program operation by sequencer

220 L/sec (N2, with protective wire mesh)

Equipped with monitoring and protection functions using digital control

1×10^-5 Pa or less (pressure of the pump alone)

0.4kW

250 L/min

1.6×10^-2 Pa or less (pressure of the pump alone)

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About Company Handling This Product

Arios Co., Ltd.

Response Rate

100.0%

Response Time

1.7hrs

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