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  2. Small RF plasma source SRPS-101 (Arios Co., Ltd.)
Small RF plasma source SRPS-101-SRPS-101
Small RF plasma source SRPS-101-Arios Co., Ltd.

Small RF plasma source SRPS-101
Arios Co., Ltd.

About This Product

■Summary

This small plasma source is an "inductively coupled small plasma source" developed for the purpose of cleaning samples. The unique manual matching circuit enables stable plasma generation, and when installed in an electron microscope, it can be used for sample cleaning, high-precision analysis, and film deposition assist. The plasma chamber is made of quartz, and electrodeless discharge enables processes with less metal contamination. It can operate stably for a long time even when active gas is introduced, and it is possible to obtain clean atoms, radical beams, etc.

■Features

・Achieved miniaturization through dedicated design. ・The dedicated matching mechanism allows for easy operation and stable operation for long periods of time. ・Operating pressure is 0.4Pa (3mTorr) to 400Pa (3Torr). Air, Ar (N2, O2) ・Since it is air-cooled and does not require cooling water, it can be easily installed into existing equipment. ・High-precision plasma emission spectroscopy is possible using optical fibers. ・He leakage amount 1.0×10^-11 [Pa･m^3･s^-1] or less (excluding transmission from O-ring and quartz)

■Standard configuration

・SRPS-101 small RF plasma source body (with manual matching device) 1 unit ・RP101 RF power supply 1 unit ・1 set of cables

  • Product

    Small RF plasma source SRPS-101

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1 Models of Small RF plasma source SRPS-101

Image Part Number Price (excluding tax) Mass Maximum exit aperture Matching box Discharge chamber material Connection flange Cooling method Baking temperature Plasma excitation method Gas introduction system RF output
Small RF plasma source SRPS-101-Part Number-SRPS-101

SRPS-101

Available upon quote

Approximately 3kg

Φ20mm

Manual matching device

Made of transparent quartz

NW40 or CF70

Forced air cooling

Maximum 150℃ (excluding cable and matching box)

Inductive Coupling (ICP)

1/4 VCRTM Male or 1/4 SwagelokTM

0~100W 13.56MHz ± 1kHz

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About Company Handling This Product

Arios Co., Ltd.

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