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  2. Ultra-compact microwave plasma source SMPS-201 (Arios Co., Ltd.)
Ultra-compact microwave plasma source SMPS-201-SMPS-201
Ultra-compact microwave plasma source SMPS-201-Arios Co., Ltd.

Ultra-compact microwave plasma source SMPS-201
Arios Co., Ltd.

Arios Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

1.7hours

Very Fast Response

About This Product

■Summary

This machine is an ultra-compact microwave-excited plasma source. It was developed with the assumption that it would be installed in the middle of a gas line or exhaust line. It can be easily used as a radical source for oxidation treatment, nitriding treatment, etching, etc. by installing it upstream of the gas line of a plasma device and performing preprocessing.

■Features

・The plasma chamber is made of high-purity alumina, and discharge can be visually confirmed. ・Electrodeless discharge. High-density plasma has been achieved using a new microwave supply method. - Completely shielded structure makes it extremely safe against microwave leakage. - Completely air-cooled, no cooling water required. ・Various active gases can be used. - Microwaves are supplied via coaxial cable, eliminating the need for troublesome waveguide connections. - Equipped with an igniter for easy discharge. -Lightweight design with the plasma source weighing only 1.9kg.

■Application examples

・Chamber cleaning, contamination removal ・Increase process speed by installing in the middle of the gas line ・Activate the main plasma ・Promotion of gas decomposition ・Reducing the burden on abatement equipment by decomposing waste gas

■Standard configuration

・SMPS-201 plasma source body 1 unit ・MP-201B 200W microwave power supply 1 unit ・TSTB-201A coaxial three-stub tuner 1 unit ・1 set of cables

■Options

・Gas introduction system: 3/8 VCRTM ・Connection flange: NW40

  • Product

    Ultra-compact microwave plasma source SMPS-201

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1 Models of Ultra-compact microwave plasma source SMPS-201

Image Part Number Price (excluding tax) Mass Igniter Maximum exit aperture Discharge chamber diameter Discharge chamber Connection flange Cooling method Microwave input Baking Gas inlet
Ultra-compact microwave plasma source SMPS-201-Part Number-SMPS-201

SMPS-201

Available upon quote

1.9kg

High voltage pulse application type (automatic)

Φ15mm

Φ20mm

High purity alumina

Φ70CF

Forced air cooling method (cooling fan)

MAX 200W

Maximum 150℃ (flange part only)

1/4 VCRTM

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About Company Handling This Product

Arios Co., Ltd.

Response Rate

100.0%

Response Time

1.7hrs

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