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  2. Microwave radical source EMRS-211Q (Arios Co., Ltd.)
Microwave radical source EMRS-211Q-EMRS-211Q
Microwave radical source EMRS-211Q-Arios Co., Ltd.

Microwave radical source EMRS-211Q
Arios Co., Ltd.

Arios Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

1.7hours

Very Fast Response

About This Product

■Summary

EMRS-211Q is a quartz discharge tube type, chamber external type, magnetic field type microwave excited radical source. Ideal for radical oxidation, nitridation, hydrogen reduction, etching, and film formation assist applications. It can also be used as a plasma source.

■Features

- The plasma chamber is made of quartz glass and discharge can be visually confirmed. ・In addition to being used as a radical source, ion acceleration is possible by using a high voltage power supply for acceleration (optional). ・It is possible to introduce various active gases. - Microwaves are supplied via coaxial cable, eliminating the need for troublesome waveguide connections.

■Standard configuration

・Radical source (EMRS-211Q) 1 unit ・200W microwave power supply (MP-201B) 1 unit ・Cables (MP-201B standard accessories reference) 1 set

  • Product

    Microwave radical source EMRS-211Q

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1 Models of Microwave radical source EMRS-211Q

Image Part Number Price (excluding tax) Mass Igniter Maximum exit aperture Connection flange Cooling method Baking Gas introduction system
Microwave radical source EMRS-211Q-Part Number-EMRS-211Q

EMRS-211Q

Available upon quote

4.7kg

High voltage pulse application type (automatic)

25mm

Φ114CF installation

Forced air cooling (no cooling water required)

Maximum 150℃ (waveguide section maximum 60℃)

Φ34CF port 2 systems

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About Company Handling This Product

Arios Co., Ltd.

Response Rate

100.0%

Response Time

1.7hrs

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