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Vacuum annealing equipment-Vacuum annealing equipment
Vacuum annealing equipment-Arios Co., Ltd.

Vacuum annealing equipment
Arios Co., Ltd.

Arios Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

0.9hours

Very Fast Response


About This Product

■Device overview

This device is a high vacuum heating device (annealing furnace) for heating 3" to 8" substrates and vacuum components to 200 to 600℃ in vacuum. It is also ideal for annealing and vacuum degassing treatments such as ion beam damage recovery. As introduced in the manufacturing process, high-temperature gas treatment, and how to drive to ultra-high vacuum, vacuum degassing treatment of parts used in ultra-high vacuum containers is also important in order to reach the specified degree of vacuum. For the characteristics and trials of ion beams, please see ion beams and their applications. We are happy to discuss the number of sheets to be processed in one go and the board size.

■Features

- Carbon heater allows high temperature heating in a short time. ・Clean vacuum heating is possible by exhausting with a turbo molecular pump. -Equipped with a gas introduction system, allowing heating in various gas atmospheres (0.5Pa or less). - Exhaust operation is automatic by touch panel operation. - PID control of heating temperature using thermocouple or pyrometer.

  • Product

    Vacuum annealing equipment

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1 Models of Vacuum annealing equipment

Image Part Number Price (excluding tax) Weight Installation area Utility Heating temperature Ultimate pressure Gas introduction system
Vacuum annealing equipment-Part Number-Vacuum annealing equipment

Vacuum annealing equipment

Available upon quote

Approximately 500 kg

Approximately 1,400 (W) × 1,000 (D) mm

Single phase AC200V 50A
Single phase AC100V 20A
Compressed air (for valve operation) 0.5~0.7MPa
Dry nitrogen (for atmospheric release) 0.1~0.5MPa

Maximum 600℃ (in-plane uniformity within ± 10℃)

5×10^-6 Pa or less

Up to 6 systems (variable leak valve, VCR connection)

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About Company Handling This Product

Response Rate

100.0%


Response Time

0.9hrs

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