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Ultra-high vacuum pumping equipment UHVPS-UHVPS
Ultra-high vacuum pumping equipment UHVPS-Arios Co., Ltd.

Ultra-high vacuum pumping equipment UHVPS
Arios Co., Ltd.

Arios Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

1.7hours

Very Fast Response


About This Product

■Summary

Manufacturing ultra-high vacuum pumping equipment requires many techniques, from material selection, welding, cleaning, surface polishing and surface treatment to handling. Our company manufactures various types of ultra-high vacuum pumping equipment by utilizing the ultra-high vacuum equipment manufacturing technology cultivated through molecular beam cells and MBE equipment. We have received favorable reviews from customers who are already using our equipment, such as the ability to reach ultra-high vacuum in a short time. This device is equipped with a hatch for sample exchange in the main chamber, and can be used for a variety of experiments by combining various components such as various plasma sources, heating mechanisms, evaporation sources, and gas supply systems.

■Features

・Based on a clean vacuum, it can be used for many experiments such as film formation and etching. - Compact chamber + simple configuration allows for easy maintenance. - Can be introduced at low cost due to minimal configuration and fully manual type. ・Customization is possible by installing various options.

■Options

・Substrate heating mechanism ・Board up and down mechanism ・Load lock mechanism ・Various plasma sources ・Heating mechanism ・Vapor deposition source ・Various gas supply systems

  • Product

    Ultra-high vacuum pumping equipment UHVPS

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1 Models of Ultra-high vacuum pumping equipment UHVPS

Image Part Number Price (excluding tax) Weight Vacuum gauge Utility power supply Utility compressed air Main body stand Size Load lock hatch Rotary pump motor output Rotary pump pumping speed Leak amount Chamber ultimate pressure Chamber Turbomolecular pump pumping speed Turbomolecular pump control power supply
Ultra-high vacuum pumping equipment UHVPS-Part Number-UHVPS

UHVPS

Available upon quote

Body approx. 60kg

Compact full range CC gauge

Single phase 200V/15A (max)

Pressure 0.4~0.6 MPa (Connection diameter Rc 1/4)

With casters and adjusters

500mm×600mm H1100mm

Made of SUS304 O-ring type

0.45kW

250 L/min

6.7×10^-11 Pa・m^3/sec or less

1×10^-4 Pa or less (with no load in the chamber)

Made of SUS304 (inner mirror finish, electrolytic polishing treatment)

260~355 L/sec (N2, with protective wire mesh) Made by Pfeiffer TM or
220~350 L/sec (N2, with protective wire mesh) Made by Osaka Vacuum Equipment Manufacturing TM

Equipped with digital control monitoring and protection functions

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About Company Handling This Product

Response Rate

100.0%


Response Time

1.7hrs

  • Japan

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