3D measuring device Non-contact thickness measurement system
COMS Co., Ltd.
About This Product
■Non-contact thickness measurement system
This is a system that uses two laser displacement sensors to sandwich the object to be measured from above and below and measure the thickness without contact. In conjunction with an automatic stage system, it is possible to measure thickness at multiple points and easily measure thickness changes over one surface from the thickness measurement results at each point.
■Easy setting of sensor and measurement sample using dedicated thickness measurement jig
When measuring thickness using non-contact laser displacement sensors, the alignment of the two sensors, firm fixation, and sample setup have a significant impact on the measurement results. The dedicated thickness measurement jig comes with a fixing jig specifically for the laser displacement sensor and a sample installation stand set up in advance, making it extremely easy to install the laser displacement sensor and set up the measurement sample.
■Non-contact thickness measurement regardless of the measurement target
Measurement is performed using a non-contact laser displacement sensor, so there is no contact or damage to the measurement sample. It is possible to measure the thickness of objects that are difficult to measure with conventional contact thickness measuring instruments, such as samples that cannot touch the surface, such as semiconductor wafers and liquid crystal glass, and soft samples that change shape when they come into contact. .
■If you prepare a master work, it is also possible to measure the absolute value of the thickness.
A laser displacement sensor is a measuring device that measures the relative distance (position) between the sensor part and the object to be measured. By measuring a master sample of known thickness and performing calibration, it is possible to accurately measure the absolute value of the thickness. It is possible to attach a reference gauge such as a thickness gauge to the thickness measurement jig, and when starting measurement, it is possible to accurately calibrate and measure the thickness, ensuring reliable measurement. I made it possible.
■Positioning and data collection can be easily set using EXCEL compatible software.
Positioning of the automatic stage, collection of measurement data, calculation of measurement data of the upper and lower laser displacement sensors, and results (cross determination, good/defective product determination) can all be done with one simple EXCEL-linked measurement/positioning application software, E-mesure. Masu. After setting the measurement, all measurements can be performed with the touch of a button.
■Others
Supports all kinds of customization according to the user's sample
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Product
3D measuring device Non-contact thickness measurement system
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Handling Company
COMS Co., Ltd.
1 Models of 3D measuring device Non-contact thickness measurement system
| Product Image | Part Number | Price (excluding tax) | Automated stage system section Repeatable positioning accuracy | Automated stage system section dead weight | Automatic stage system department Lost motion | Automatic stage system department backlash | Automatic stage system motor | Automatic stage system movement amount | Automatic stage system positioning accuracy | Automatic stage system section Parallelism A | Automatic stage system section feeding method | Automatic stage system section guide method | Automatic stage system section load capacity | Automatic stage system section maximum movement speed | Automatic stage system section movement direction | Automatic stage system section movement resolution | Automatic stage system section table size | Automatic stage system straightness (horizontal/vertical) | Compatible application software | Compatible controller High-speed analog controller | Compatible controller Position controller | Laser displacement sensor measurement range | Laser displacement sensor section measurement resolution | Laser displacement sensor section sensor head position adjustment | Laser displacement sensor unit measurement reference distance | Laser displacement sensor unit repeatability |
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TAP-2H-50XY |
Available upon quote | ±1μm | Approximately 41kg | 5μm | 1μm | 0.75A/phase 5-phase stepping motor | 50×50mm | 10μm | 15μm | Precision ball screw lead 5mm | Linear slide guide | 15kg | 30mm/sec | XY axis | 0.5μm (number of divisions: when set to 1/20) | 150×80mm | 8μm | Excel-compatible position measurement software, Excel-compatible general-purpose data collection software E-Measure2 | TUSB-0216ADMZ, AIO-163202FX-USB | CP-700M |
±1mm *This is an example of the accuracy of a single laser displacement meter that can be installed in the system. Actual accuracy varies depending on the type of laser displacement meter, object to be measured, required specifications, etc. |
0.01μm *This is an example of the accuracy of a single laser displacement meter that can be installed in the system. Actual accuracy varies depending on the type of laser displacement meter, object to be measured, required specifications, etc. |
Rack and pinion type XYZ-axis manual stage (upper sensor head) |
10mm *This is an example of the accuracy of a single laser displacement meter that can be installed in the system. Actual accuracy varies depending on the type of laser displacement meter, object to be measured, required specifications, etc. |
0.01μm *This is an example of the accuracy of a single laser displacement meter that can be installed in the system. Actual accuracy varies depending on the type of laser displacement meter, object to be measured, required specifications, etc. |
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About Company Handling This Product
- Japan