Measurement system compatible with white interference 3D displacement meter WI-5000 series compatible measurement system
COMS Co., Ltd.
About This Product
This is a measurement system combined with the KEYENCE WI series. Keyence's white interferometric 3D displacement meter WI series can measure 80,000 three-dimensional shapes with high precision over a measurement area of up to 10 x 10 mm. The COMS measurement system can be combined with this WI series to automatically collect measurement data in EXCEL while automatically moving and measuring a wider range.
■Excel compatible automatic measurement software E-Measure2
Select whether to measure in a matrix (grid) or each coordinate registered in Excel. You can acquire measurement data from the WI-5000 while moving automatically and collect the data in Excel in real time.
We will take care of delivery and installation of the measurement system, initial software settings, and operation training, so you can use it immediately after installation. (WI-5000 operating instructions will be provided by Keyence personnel)
■E-Measure2WI-AT, which adds tilt tracking function to E-Measure2WI, is born.
・Keyence White Interference 3D Displacement Meter WI-5000 series has a function that uses the pattern search function to calculate the inclination between the master registered sample and the actually placed measurement sample, automatically corrects it according to that angle, and performs the measurement. Added.
・Calculate angle with pattern search function
■Other functions
・Move based on the obtained angle (equal pitch measurement (stop))
- Also supports tilt tracking function using a camera.
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Product
Measurement system compatible with white interference 3D displacement meter WI-5000 series compatible measurement system
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Handling Company
COMS Co., Ltd.
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Categories
1 Models of Measurement system compatible with white interference 3D displacement meter WI-5000 series compatible measurement system
| Product Image | Part Number | Price (excluding tax) | Amount of movement | Backlash | Direction of movement | External dimensions | Feeding method | Loadable weight | Lost motion | Minimum movement resolution | On-board drive motor | Positioning accuracy | Repeatable positioning accuracy | Sample stage size | Straightness (horizontal/vertical) | Weight |
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BS1010XY |
Available upon quote | 100×100mm | 2μm | XY axis | 370×390×347(H)mm | Precision ball screw | 14Kg | 3μm | 0.1μm (at 40 divisions) | 5 phase stepper motor | 18μm (at full stroke) | ±1μm | 120×120mm | 10μm (at full stroke) | Approximately 15kg |
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About Company Handling This Product
- Japan