Vacuum semi-automatic prober
Apollo Wave Co., Ltd.
About This Product
■Features
・For automatic measurement of extremely low and high temperatures in vacuum and gas environments, organic devices, and power devices.
- Vacuum semi-automatic prober that supports sample sizes up to 4 inches square. (6-inch model will be added to the lineup)
・Many devices can be measured automatically and continuously, allowing for efficient measurements.
・Equipped with a -190℃ to +200℃ stage.
・The design ultimate vacuum level is 1×10-3Pa.
・By creating a vacuum environment, it is effective as a countermeasure against discharge during high voltage measurements. (High voltage measurement of power devices)
- Control software that is easy for operators to understand and has excellent operability, common to the semi-automatic prober AP series.
- It has a wafer alignment function that uses a model to adjust the wafer angle and finely adjust the XY position.
・With GP-IB communication, it is possible to control measuring instruments such as semiconductor parameter analyzers and semi-automatic probers from a host PC.
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Product
Vacuum semi-automatic prober
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Handling Company
Apollo Wave Co., Ltd.
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Categories
1 Models of Vacuum semi-automatic prober
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Vacuum semi-automatic prober |
Available upon quote |
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About Company Handling This Product
- Japan