This product is registered by Apollo Wave Co., Ltd..
About This Product
■Features
・Temperature characteristic evaluation from -60℃ to +350℃, micro current measurement.
・Supports power device measurement of 20kV or more and 200A or more.
- Semi-automatic prober compatible with wafer sizes up to 8 and 12 inches.
- Compact shield mechanism that can replace dry air prevents condensation even at minus temperatures.
・Stable microcurrent measurement is possible due to the compact shielding effect.
- Control software that is easy for operators to understand and has excellent operability.
- Can be equipped with automatic wafer alignment and automatic individual chip alignment using image recognition.
- The control software has excellent operability, with icons arranged in the order of the process so that the operator does not get confused.
- It has a wafer alignment function that uses a model to adjust the wafer angle and finely adjust the XY position.
- After registering the die origin position, it has a function that automatically detects the characteristic pattern through image processing and registers it as a reference model.
・It is also possible to automatically align registered individual chips placed in a registered tray using image recognition. (optional)
・Auto XYZ can be installed to handle wafer expansion, etc. (optional)
・It is possible to control the semi-automatic prober from the host PC and measuring instrument using GP-IB communication.
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