This product is registered by Apollo Wave Co., Ltd..
About This Product
■Features
・Small prober ideal for IV/CV measurements on up to 4-inch wafers.
- Compact prober compatible with wafer sizes up to 4 inches.
・The stage's XY has a coarse movement mechanism with a quick position and a fine movement mechanism with a micrometer.
・The platen Z has a coarse movement mechanism using a lever and a fine movement mechanism using a micrometer.
・We have received high levels of satisfaction, including ease of use.
- Switched to a new model starting from June 2020 shipments.
・The new α100, which has been well received by the current model, is now more compact.
- The Z position switching lever has been changed from a front/horizontal lever operation to a left back/up/down lever operation, making it easier to use.
・The adjustment range of Z fine movement has been expanded from 5mm to 10mm.
■Application
・Microcurrent IV measurement (fA level)
・CV measurement
・High frequency measurement
・Various resistance measurements such as sheet resistance
・Temperature characteristic test
■Options
・Hot chuck from room temperature to 300℃
・Chuck triaxial connection
・Set with shield box
・Probe card (4.5 inch square board)
■Selectable optical system
・Stereomicroscope (standard)
・Trinocular stereo microscope
・Zoom micro CCD camera
■Measuring devices that are expected to be connected
・Semiconductor parameter analyzer
・Source measure unit
・Curve tracer
・LCR meter
・Digital multimeter
・Impedance analyzer
・Network analyzer
・Other various measuring instruments from various companies
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