This product is registered by Apollo Wave Co., Ltd..
About This Product
■Features
・Standard model compatible with various wafer level measurements.
- Manual prober compatible with wafer sizes up to 6, 8, and 12 inches.
- Also supports suction and fixation of chips.
・The stage's XY has a coarse movement mechanism with a quick position and a fine movement mechanism with a micrometer.
・The platen Z has a coarse movement mechanism using a lever and a fine movement mechanism using a micrometer.
・We have received high levels of satisfaction, including ease of use.
■Application
・Microcurrent IV measurement (fA level)
・CV measurement
・High power measurement at 20kV/200A level
・High frequency measurement
・Various resistance measurements such as sheet resistance
・Temperature characteristic test
・Reliability tests such as TDDB
■Options
・Hot chuck from room temperature to 350℃
・Chuck triaxial connection
・High voltage/large current compatible chuck
・Set with shield box
・Equipped with a laser cutter
・Probe card (4.5 inch square board)
・Light irradiation mechanism
■Selectable optical system
・Stereomicroscope (standard)
・Trinocular stereo microscope
・Zoom micro CCD camera
・Metal microscope
■Measuring devices that are expected to be connected
・Semiconductor parameter analyzer
・Power device analyzer
・Source measure unit
・Curve tracer
・LCR meter
・Digital multimeter
・Impedance analyzer
・Network analyzer
・Other various measuring instruments from various companies
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