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  4. Manual prober α150 / α200 / α300 (Apollo Wave Co., Ltd.)
Manual prober α150 / α200 / α300-Α150
Manual prober α150 / α200 / α300-Apollo Wave Co., Ltd.

Manual prober α150 / α200 / α300
Apollo Wave Co., Ltd.

About This Product

■Features

・Standard model compatible with various wafer level measurements. - Manual prober compatible with wafer sizes up to 6, 8, and 12 inches. - Also supports suction and fixation of chips. ・The stage's XY has a coarse movement mechanism with a quick position and a fine movement mechanism with a micrometer. ・The platen Z has a coarse movement mechanism using a lever and a fine movement mechanism using a micrometer. ・We have received high levels of satisfaction, including ease of use.

■Application

・Microcurrent IV measurement (fA level) ・CV measurement ・High power measurement at 20kV/200A level ・High frequency measurement ・Various resistance measurements such as sheet resistance ・Temperature characteristic test ・Reliability tests such as TDDB

■Options

・Hot chuck from room temperature to 350℃ ・Chuck triaxial connection ・High voltage/large current compatible chuck ・Set with shield box ・Equipped with a laser cutter ・Probe card (4.5 inch square board) ・Light irradiation mechanism

■Selectable optical system

・Stereomicroscope (standard) ・Trinocular stereo microscope ・Zoom micro CCD camera ・Metal microscope

■Measuring devices that are expected to be connected

・Semiconductor parameter analyzer ・Power device analyzer ・Source measure unit ・Curve tracer ・LCR meter ・Digital multimeter ・Impedance analyzer ・Network analyzer ・Other various measuring instruments from various companies

  • Product

    Manual prober α150 / α200 / α300

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1 Models of Manual prober α150 / α200 / α300

Image Part Number Price (excluding tax) Weight Compatible wafer size External dimensions (W×D×H) Platen Z-axis coarse movement Platen Z-axis fine movement Stage θ movement range Stage XY movement range (coarse movement) Stage XY movement range (fine movement)
Manual prober α150 / α200 / α300-Part Number-Α150

Α150

Available upon quote

70kg

~6 inches

540×635×602mm

0ｰ0.3ｰ5mm (3 steps)

10mm

±5°

X: 150mm Y: 200mm

X: ±12.5mm Y: ±12.5mm

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About Company Handling This Product

Apollo Wave Co., Ltd.

  • Japan

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