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  4. Manual prober α200CS / α300CS (Apollo Wave Co., Ltd.)
Manual prober α200CS / α300CS-Α200CS
Manual prober α200CS / α300CS-Apollo Wave Co., Ltd.

Manual prober α200CS / α300CS
Apollo Wave Co., Ltd.

About This Product

■Features

・Model compatible with temperature characteristic evaluation from -60℃ to +350℃ and microcurrent measurement. -Manual probers compatible with wafer sizes up to 8 and 12 inches. - Compact shield mechanism that can replace dry air prevents condensation even at minus temperatures. ・Stable microcurrent measurement is possible due to the compact shielding effect. ・The stage's XY has a coarse movement mechanism with a quick position and a fine movement mechanism with a micrometer. ・The platen Z has a coarse movement mechanism using a lever and a fine movement mechanism using a micrometer. ・8 positioners can be placed.

■Application

・Microcurrent IV measurement (fA level) ・CV measurement ・High power measurement at 20kV/200A level ・High frequency measurement ・Various resistance measurements such as sheet resistance ・Temperature characteristic test in high and low temperature environments ・Reliability tests such as TDDB

■Options

・Thermo chuck for -60 to 350℃ ・Chuck triaxial connection ・High voltage/large current compatible chuck ・Change to CCD camera type ・Probe card (4.5 inch square board) ・Light irradiation mechanism

■Selectable optical system

・Stereomicroscope (standard) ・Trinocular stereo microscope ・Zoom micro CCD camera ・Metal microscope

■Measuring devices that are expected to be connected

・Semiconductor parameter analyzer ・Power device analyzer ・Source measure unit ・Curve tracer ・LCR meter ・Digital multimeter ・Impedance analyzer ・Network analyzer ・Other various measuring instruments from various companies

  • Product

    Manual prober α200CS / α300CS

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1 Models of Manual prober α200CS / α300CS

Image Part Number Price (excluding tax) Weight Compatible wafer size External dimensions (W×D×H) Platen Z-axis coarse movement Platen Z-axis fine movement Stage θ movement range Stage XY movement range (coarse movement) Stage XY movement range (fine movement)
Manual prober α200CS / α300CS-Part Number-Α200CS

Α200CS

Available upon quote

80kg

~8 inches

690×780×620mm

0ｰ0.3ｰ5mm (3 steps)

10mm

±5°

X: 200mm Y: 200mm

X: ±12.5mm Y: ±12.5mm

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About Company Handling This Product

Apollo Wave Co., Ltd.

  • Japan

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