Highly airtight joint product of ceramic and metal produced by metallization and brazing technology Spiral hole insulated pipe (for sputtering equipment/CVD equipment)
Kawaso Texel Co., Ltd.
About This Product
Ideal for suppressing electrical discharge when introducing process gas
This is a type of insulated pipe made of ceramic with a spiral hole. By creating a spiral shape, it is possible to suppress the occurrence of linear discharge. Also, unlike a simple straight pipe specification, it is possible to secure a longer insulation distance even though the overall length is the same.
■Features
- Suppression of electrical discharge by increasing the distance between electrodes and gas flow path.
・Contributes to space saving of equipment by ensuring insulation distance.
・Used for plasma processing equipment, CVD equipment, sputtering equipment, etc. for etching and film formation.
Please try our spiral hole insulated pipe, which is ideal for using various process gases.
■Standard specification product characteristics
・Airtightness: 1.0x10-10Pa m3/sec or less
・Flow path length: approx. 190mm
■Custom order spiral hole insulation pipe
- If you cannot select from standard specifications, we can also manufacture custom orders.
・We will propose the optimal design based on your desired shape and dimensions.
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Product
Highly airtight joint product of ceramic and metal produced by metallization and brazing technology Spiral hole insulated pipe (for sputtering equipment/CVD equipment)
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Handling Company
Kawaso Texel Co., Ltd.
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Categories
1 Models of Highly airtight joint product of ceramic and metal produced by metallization and brazing technology Spiral hole insulated pipe (for sputtering equipment/CVD equipment)
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
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Standard spiral hole insulation pipe |
Available upon quote |
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About Company Handling This Product
- Japan