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Oxide substrate for thin film growth Titanium oxide (rutile)-TOーASー10N
Oxide substrate for thin film growth Titanium oxide (rutile)-Shinkosha Co., Ltd.

Oxide substrate for thin film growth Titanium oxide (rutile)
Shinkosha Co., Ltd.


About This Product

■Since the 1980s, our company has continued to contribute to the advancement of science and technology, including providing SrTiO3 and sapphire substrates as substrates for high-temperature superconducting thin films and GaN.

For epitaxial growth substrates, the presence or absence of crystal lattice distortion on the outermost surface is important, as well as crystallinity, smoothness and flatness of the substrate surface. Based on our accumulated technology over many years, we carry out integrated production in-house, from crystal growth (with the exception of some crystals) to processing.Using high-precision processing technology, we can finish the surface of a high-quality crystal substrate without any processed distortion layers. I am. We provide oxide crystal substrates that are ideal for epitaxial growth of dielectrics, superconductors, compound semiconductors, etc.

■Titanium oxide (rutile)

In addition to being used as an optical material that uses birefringence, rutile is also attracting attention as a substrate for epitaxial growth. Our company performs integrated production from crystal growth using the Bernoulli method to substrate processing. As a rutile crystal, it boasts the world's top level in terms of size, quality, and production volume. We also offer Nb:TiO2 substrates doped with Nb to make them conductive, and STEP substrates that are atomically flat. Please make use of our rutile substrates, which are ideal for various epitaxial growth, in your research.

■Physical properties

・Composition TiO2 ・Crystal system: Tetragonal ・Crystal structure: Rutile type ・Lattice constant a=0.45935 nm c=0.29580 nm ・Melting point 1,840℃ ・Creating method: Bernoulli method ・Density 4.252 g/cm3 (20 ℃) ・Dielectric constant 113 (1 MHz) ・Thermal expansion coefficient (30 to 400℃) (A-axis direction) 7.81×10^-6/℃ (C-axis direction) 10.1×10^-6/℃ ・Band gap 3.0 eV ・Refractive index (at 706.5 nm) no=2.5490 ne=2.8226

■Options

・STEP board ・OFF board ・Break grooved board

  • Product

    Oxide substrate for thin film growth Titanium oxide (rutile)

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1 Models of Oxide substrate for thin film growth Titanium oxide (rutile)

Image Part Number Price (excluding tax) Surface orientation (tolerance: ±0.5°) Surface roughness Surface treatment Purity Polishing Resistivity (Ω・cm) Flatness (λ=632.8 nm) Dope Size Orifla
Oxide substrate for thin film growth Titanium oxide (rutile)-Part Number-TOーASー10N

TOーASー10N

Available upon quote

-100

Ra≦1.0nm
Rmax≦5.0nm

Standard

>99.98%

One side

>10^7

≦λ

Non

External shape tolerance ±0.1mm, thickness tolerance ±0.05mm: 10×10×0.5t

-1

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