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  4. Dry Vacuum Pump For Clean Processes High Pumping Speed ​​Dry Pump TS Series (UNOZAWA-GUMI IRON WORKS,LTD.)
Dry Vacuum Pump For Clean Processes High Pumping Speed ​​Dry Pump TS Series-TS100
Dry Vacuum Pump For Clean Processes High Pumping Speed ​​Dry Pump TS Series-UNOZAWA-GUMI IRON WORKS,LTD.

Dry Vacuum Pump For Clean Processes High Pumping Speed ​​Dry Pump TS Series
UNOZAWA-GUMI IRON WORKS,LTD.

About This Product

This is an "ECO dry vacuum pump for clean processes" with low power consumption and excellent durability. Ideal for non-corrosive gas applications that require a clean vacuum without oil back-diffusion and high reliability.

■Low power consumption

Since it is a multi-stage roots type, power consumption can be significantly reduced.

■High durability

It has excellent durability because it is a multi-stage roots type with a backflow cooling mechanism.

■Clean vacuum

There is no back-diffusion of oil or dust generation inside the pump.

■Low noise/low vibration

The rotor is precisely balanced and an exhaust silencer is fitted as standard.

■Less heat radiation

Since it is water-cooled, it has a structure that radiates less heat to the surrounding area.

■Leak tight structure

By adopting a canned motor, the leak rate is less than E10-6Pa・m3/sec.

■Long maintenance cycle

Since there are no sliding parts in contact with gas, long-term continuous operation is possible.

■Applications

・Vacuum deposition equipment, sputtering equipment ・Load lock ・Plasma cleaning device ・Silicon single crystal pulling equipment ・Electron beam processing machine ・Gas circulation/recovery equipment ・Gas replacement ・Vacuum forming equipment ・Vacuum suction transport ・Vacuum packaging machine ・Vacuum degassing/defoaming ・Vacuum cooling ・Analysis equipment, physical and chemical experiment equipment ・Roughing and remanufacturing of cryopumps ・TMP back pump for various roughing operations ・Other clean vacuum equipment

■Safety precautions

Please use this vacuum pump for clean vacuum pumping applications. Do not exhaust gases containing corrosive gases, toxic gases, explosive/flammable gases, solvents, etc.

■We can also supply the following optional accessories.

・Pump case ・Operation panel ・N2 purge ・Discharge silencer ・Flow switch for cooling water

  • Product

    Dry Vacuum Pump For Clean Processes High Pumping Speed ​​Dry Pump TS Series

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1 Models of Dry Vacuum Pump For Clean Processes High Pumping Speed ​​Dry Pump TS Series

Image Part Number Price (excluding tax) Power supply V Power supply Hz Product specifications Lubricant quantity lit. Product specifications Maximum back pressure kPa Product specifications Maximum pumping speed m3･h-1 Product specifications Ambient temperature range °C Product specifications Suction port diameter Product specifications Discharge port diameter Product specifications Ultimate pressure Pa Basic structure Dry vacuum pump Basic structure Cooling water flow rate L･m-1 Cooling water maximum inlet temperature °C Cooling water inlet/outlet diameter Rc Motor rating (dry vacuum pump) kW
Dry Vacuum Pump For Clean Processes High Pumping Speed ​​Dry Pump TS Series-Part Number-TS100

TS100

Available upon quote

200-240
50Hz:380-415
60Hz:440-480

50Hz
60Hz

1

110

50Hz:96
60Hz:114

5~40

NW50

NW40

50Hz:10
60Hz:6

TS100

Dry vacuum pump

＞4

30

3/8

3.7

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About Company Handling This Product

UNOZAWA-GUMI IRON WORKS,LTD.

Company Overview

UNOZAWA-GUMI IRON WORKS, LTD. is a Japanese manufacturer that was established in 1899. The company specializes...

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