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  4. Fluororesin lining on gas contact parts Roots type dry vacuum pump (Surf Industry Co., Ltd.)
Fluororesin lining on gas contact parts Roots type dry vacuum pump-Roots dry vacuum pump
Fluororesin lining on gas contact parts Roots type dry vacuum pump-Surf Industry Co., Ltd.

Fluororesin lining on gas contact parts Roots type dry vacuum pump
Surf Industry Co., Ltd.

About This Product

The Roots-type dry vacuum pump VP series is a product whose parts in contact with gas are lined with fluororesin. The fluororesin lining has a thickness of 300μm or more and is resistant to halogen gases and strong acid gases. Precision finishing has achieved thick film lining and extremely small clearance. It can be used in applications such as semiconductors, pharmaceuticals, chemicals, and high-performance materials. The gas contact area is lined with fluororesin, making it ideal for inhaling halogen gases and strong acid gases.

■Features

・Fluororesin lining construction for gas contact areas ・Fluororesin lining 300μm or more ・Ideal for inhaling halogen gases and strong acidic gases

■Chemical resistance

・Hydrogen fluoride ・Hydrogen chloride ・Hydrogen iodide etc...

■Applications

·semiconductor ・Pharmaceutical, chemistry ・Highly functional materials ・Nonferrous metals, inorganic *General equipment that uses corrosive gas

■Accomplishments

・Hydrogen iodide gas (switched from ceramic pump) →VP4-501×5.5kW 1.6m3/min×8.0kPa・A ・Chloride gas → VP4-651×7.5kW 2.67m3/min×0.33kPa・A

  • Product

    Fluororesin lining on gas contact parts Roots type dry vacuum pump

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1 Models of Fluororesin lining on gas contact parts Roots type dry vacuum pump

Image Part Number Price (excluding tax)
Fluororesin lining on gas contact parts Roots type dry vacuum pump-Part Number-Roots dry vacuum pump

Roots dry vacuum pump

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About Company Handling This Product

Surf Industry Co., Ltd.

  • Japan

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