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Semiconductor manufacturing equipment MERCURY-MERCURY
Semiconductor manufacturing equipment MERCURY-Cellback Co., Ltd.

Semiconductor manufacturing equipment MERCURY
Cellback Co., Ltd.


About This Product

PEGASUS 1500 is a large batch processing device that can accommodate G4.5 or φ6 inch (25 pieces) substrates. Single-wafer processing is not efficient in processing thick films of several tens of micrometers, but this equipment can process a large amount at once, reducing processing time. Since ICP's high-density plasma is used and processing can be performed at low temperatures, time loss and power consumption due to heat are reduced.

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    Semiconductor manufacturing equipment MERCURY

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1 Models of Semiconductor manufacturing equipment MERCURY

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Semiconductor manufacturing equipment MERCURY-Part Number-MERCURY

MERCURY

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