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  4. Semiconductor manufacturing equipment PEGASUS RTA (Cellback Co., Ltd.)
Semiconductor manufacturing equipment PEGASUS RTA-PEGASUS RTA
Semiconductor manufacturing equipment PEGASUS RTA-Cellback Co., Ltd.

Semiconductor manufacturing equipment PEGASUS RTA
Cellback Co., Ltd.

About This Product

EGASUS RTA is a substrate rotation type annealing equipment compatible with φ300mmSi. The high-purity quartz tube infrared lamp heater has high transmittance and is suitable for clean heating, and is a heater unit with excellent irradiation efficiency due to its reflector design and reflective film.

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    Semiconductor manufacturing equipment PEGASUS RTA

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1 Models of Semiconductor manufacturing equipment PEGASUS RTA

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Semiconductor manufacturing equipment PEGASUS RTA-Part Number-PEGASUS RTA

PEGASUS RTA

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About Company Handling This Product

Cellback Co., Ltd.

  • Japan

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Semiconductor Manufacturing Equipment Component & Part Machining
Semiconductor Manufacturing Equipment Component & Part Machining　Cellback Co., Ltd.
Cellback Co., Ltd.

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