This product is registered by Chiyoda Electric Co., Ltd..
About This Product
The vapor deposition process used in semiconductor manufacturing requires film formation in microns. Temperature control is also an important item in controlling the vapor pressure of the diffused gas being deposited. Our electronic thermostat achieves temperature control on the order of 100%, and we have many achievements in vapor deposition processes. It is also effective in applications that require delicate temperature control, such as in the physical and chemical fields and pharmaceutical fields.
■Main features
・The temperature of the liquid in the tank is controlled within the range of -10.00 to 70.00℃ using an electronic cooling system.
・High resolution temperature indication 0.01℃ (1/100℃)
・Achieved high temperature stability (±0.02℃) using a unique liquid circulation system.
・High-precision temperature controller developed in-house.
- Separate water tank and control section.
- Suitable for integration into various devices.
・Communication function RS-232C/RS-485 (optional)
・In addition to temperature setting and monitoring of operating status, operation/stopping can also be controlled remotely.
・It is convenient to centrally operate CVD equipment that incorporates multiple units of this unit.
This is the version of our website addressed to speakers of English in
the United States.
If you are a resident of another country, please select the appropriate version of Metoree for your country in the drop-down menu.