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  4. Electronic thermostat RT-250Z430-GE (Chiyoda Electric Co., Ltd.)
Electronic thermostat RT-250Z430-GE-RT-250Z430-GE
Electronic thermostat RT-250Z430-GE-Chiyoda Electric Co., Ltd.

Electronic thermostat RT-250Z430-GE
Chiyoda Electric Co., Ltd.

About This Product

The vapor deposition process used in semiconductor manufacturing requires film formation in microns. Temperature control is also an important item in controlling the vapor pressure of the diffused gas being deposited. Our electronic thermostat achieves temperature control on the order of 100%, and we have many achievements in vapor deposition processes. It is also effective in applications that require delicate temperature control, such as in the physical and chemical fields and pharmaceutical fields.

■Main features

・The temperature of the liquid in the tank is controlled within the range of -10.00 to 70.00℃ using an electronic cooling system. ・High resolution temperature indication 0.01℃ (1/100℃) ・Achieved high temperature stability (±0.02℃) using a unique liquid circulation system. ・High-precision temperature controller developed in-house. - Separate water tank and control section. - Suitable for integration into various devices. ・Communication function RS-232C/RS-485 (optional) ・In addition to temperature setting and monitoring of operating status, operation/stopping can also be controlled remotely. ・It is convenient to centrally operate CVD equipment that incorporates multiple units of this unit.

  • Product

    Electronic thermostat RT-250Z430-GE

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1 Models of Electronic thermostat RT-250Z430-GE

Image Part Number Price (excluding tax) Power supply Communication function (optional) Set temperature range Temperature indication/setting resolution Temperature stability *1 Water tank external dimensions (mm) Tank internal dimensions (mm) Various protection functions Control unit external dimensions (mm) Control method Cooling water temperature Cooling water flow rate Operating ambient temperature Usable liquid medium Above conditions Model
Electronic thermostat RT-250Z430-GE-Part Number-RT-250Z430-GE

RT-250Z430-GE

Available upon quote

Single phase AC200V 4A 50/60Hz

RS-232C/RS-485
Operation monitor, temperature setting, etc.
Start/stop can also be controlled remotely.

-10.00~70.00℃

0.01℃

±0.02℃
*1 Including temperature distribution (actually measured value, not guaranteed value). It may vary depending on the ambient temperature and cooling water temperature.

321W×321D×580H (excluding protrusions)

Ø250×430H (liquid level 400H)
Effective volume: 20.0L

Self-diagnosis function
Abnormal/alarm output (relay output)

260W×362D×147H (excluding protrusions)

Water-cooled electronic cooling system (Peltier system)

18~30℃ (Standard: 25℃)

2.5~5.0L/min (adjustable depending on set temperature)

5~35℃

Fluorinated media
Antifreeze etc.
distilled water

Ambient temperature 23℃
Ambient humidity 55%RH
Cooling water temperature 25℃
Liquid medium GALDEN HT200 *2
No heat load inside the tank.
*2 GALDENR® is a registered trademark of Solvay Solexis.

RT-250Z430-GE

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Chiyoda Electric Co., Ltd.

  • Japan

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