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  4. Dry vacuum pump EcopositiV series (Osaka Vacuum, Ltd.)
Dry vacuum pump EcopositiV series-ER100D
Dry vacuum pump EcopositiV series-Osaka Vacuum, Ltd.

Dry vacuum pump EcopositiV series
Osaka Vacuum, Ltd.

Osaka Vacuum, Ltd.'s Response Status

Response Rate

100.0%

Response Time

129.2hours

About This Product

■Achieved top-class energy efficiency, compactness, and weight reduction among dry vacuum pumps in its class.

・Power consumption at ultimate pressure: 400W ・Installation area: 0.11m2 ・Weight: 60kg

■Product specifications are available depending on the application.

・ER100D: Ideal for light load/clean process exhaust ・ER100DC: Made of material with high corrosion resistance, compatible with corrosive gas exhaust

■Applications

・Clean exhaust ・Roughing of sputtering equipment ・Auxiliary pump for high vacuum pumps such as TMP ・Load lock room, transfer room exhaust ・Small experimental equipment exhaust ・Adsorption conveyance system ・Exhaust of analysis and measurement equipment ・Small furnace exhaust ・Electron gun source, ion gun source exhaust

  • Product

    Dry vacuum pump EcopositiV series

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1 Models of Dry vacuum pump EcopositiV series

Image Part Number Price (excluding tax) Power supply power capacity (kVA) Power supply voltage (V) Power supply phase number Power frequency (Hz) Mass (kg) Test ultimate pressure (Pa) Pumping speed (L/min) Power consumption at ultimate pressure (W) Cooling water amount (L/min) Cooling water temperature (℃) Cooling method N2 purge gas flow rate (Pa・m3/s)
Dry vacuum pump EcopositiV series-Part Number-ER100D

ER100D

Available upon quote

3.2

200-220

Three phase

50/60

60

5

1,670

400

1.5-3.0

Max.30

Water cooling

17-20

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About Company Handling This Product

Osaka Vacuum, Ltd.

Response Rate

100.0%

Response Time

129.2hrs

Company Overview

Founded in Osaka, Japan in 1950, Osaka Vacuum, Ltd. is a manufacturer of vacuum pumps and systems that holds t...

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  • Japan

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