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Oil-lubricated composite molecular pump TG series-TG203
Oil-lubricated composite molecular pump TG series-Osaka Vacuum, Ltd.

Oil-lubricated composite molecular pump TG series
Osaka Vacuum, Ltd.

Osaka Vacuum, Ltd.'s Response Status

Response Rate

100.0%

Response Time

129.2hours


About This Product

Adopts oil-lubricated ball bearings. We have a lineup of chemical types for all classes from 200L/s to 5,500L/s, and are compatible with applications that exhaust corrosive gases.

■TG203

・Chemical type that is resistant to corrosive gas exhaust ・Structural structure that is resistant to unexpected atmospheric entry - Strong against external shocks ・Serial communication possible ・Safety standard NRTL/SEMI-S2/CE

■Applications

・Semiconductor manufacturing ・Electron gun exhaust, ion source exhaust ・FPD manufacturing ・Surface treatment, surface modification ・Manufacturing various electronic components ・Tube manufacturing, optical parts manufacturing ・Accelerators, radiation facilities, nuclear fusion research ・Heat treatment ・Research and development *For clean processes, please select the TG-F series, TG-M series, or TGkine series.

  • Product

    Oil-lubricated composite molecular pump TG series

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1 Models of Oil-lubricated composite molecular pump TG series

Image Part Number Price (excluding tax) Startup time (min) Mass (kg) Allowable auxiliary pressure (Pa / Torr) Lubricant amount (mL) Maximum compression ratio N2 Maximum compression ratio H2 Maximum gas flow Recommended auxiliary pump (L/min) Pumping speed N2 (with protective wire mesh) (L/s) Pumping speed N2 (L/s) Pumping speed H2 (L/s) Intake flange Mounting position Ultimate pressure VG・ISO-R/CF (Torr) Ultimate pressure VG・ISO-R/CF (Pa) Stop time (min) Controller model
Oil-lubricated composite molecular pump TG series-Part Number-TG203

TG203

Available upon quote

4-6

11

550/4.1

70

1×10^8

4×10^3

543

80

140

200

150

VG100 CF100 ISO-R100

Vertical (±10°)

<7.5×10^-9/< 7.5×10^-10

<1×10^-6/ < 1×10^-7

4-6

TC203

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About Company Handling This Product

Response Rate

100.0%


Response Time

129.2hrs

Company Overview

Founded in Osaka, Japan in 1950, Osaka Vacuum, Ltd. is a manufacturer of vacuum pumps and systems that holds t...

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  • Japan

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