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Magnetic bearing type composite molecular pump TG-M series-TG397M
Magnetic bearing type composite molecular pump TG-M series-Osaka Vacuum, Ltd.

Magnetic bearing type composite molecular pump TG-M series
Osaka Vacuum, Ltd.

Osaka Vacuum, Ltd.'s Response Status

Response Rate

100.0%

Response Time

129.2hours


About This Product

The use of magnetic bearings allows for completely oil-free exhaust, and it also features a long maintenance cycle. The lineup ranges from 300L/s to 3,400L/s class.

■Power saving design

Operation data, number of touchdowns, model information, etc. can be retained in the main unit. *Data can be carried over even if the controller is replaced during overhaul.

■Features

・Various communication specifications: Parallel I/O・RS232C・RS485・Profibus・DeviceNet・EtherCAT ・International standard compliance: NRTL/SEMI-S2/CE

■Applications

・Semiconductor manufacturing equipment ・FPD manufacturing equipment ・Solar cell manufacturing equipment ・Optical parts processing such as glass/lens etc. ・Film processing ・Accelerator/space environment test equipment

  • Product

    Magnetic bearing type composite molecular pump TG-M series

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1 Models of Magnetic bearing type composite molecular pump TG-M series

Image Part Number Price (excluding tax) Communication standards Startup time (min) Mass VG-ISO-B/CF (kg) Weight (kg) Allowable auxiliary pressure Pa (Torr) Maximum power requirement (VA) Maximum compression ratio N2 Maximum compression ratio H2 Maximum gas flow rate N2 (sccm) Recommended auxiliary pump (L/min) Exhaust speed N2 (protection payment) (L/s) Pumping speed N2 (L/s) Pumping speed H2 (L/s) Exhaust flange Intake flange Mounting position Ultimate pressure VG·ISO-B/CF (Torr) Ultimate pressure VG·ISO-B/CF (Pa) Output frequency (Hz) Input voltage (ACV) Number of input phases Input frequency (Hz) Stop time (min) Turbo controller model
Magnetic bearing type composite molecular pump TG-M series-Part Number-TG397M

TG397M

Available upon quote

Parallel I/O.RS232C/RS485 Profibus DeviceNet EtherCAT (If there is no instruction, it will be Parallel I/O.)

2~2.5

16/19

8

400 (3.0)

400

1×10^8

4.5×10^3

2,000

≧160

320

340

290

KF25

VG100/ISO-8100/CF100

Freely

(<7.5×10^-9/7.5×10^-10)

<1×10^-6/1×10^-7

680

200~240

Single phase

50/60

2~3

TC0301M

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About Company Handling This Product

Response Rate

100.0%


Response Time

129.2hrs

Company Overview

Founded in Osaka, Japan in 1950, Osaka Vacuum, Ltd. is a manufacturer of vacuum pumps and systems that holds t...

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  • Japan

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