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Flexible posture composite molecular pump TG-F series-TG50F
Flexible posture composite molecular pump TG-F series-Osaka Vacuum, Ltd.

Flexible posture composite molecular pump TG-F series
Osaka Vacuum, Ltd.

Osaka Vacuum, Ltd.'s Response Status

Response Rate

100.0%

Response Time

129.2hours


About This Product

Adopting grease-lubricated ball bearings, it is compact, lightweight, and low cost. In addition, this series pursues new possibilities for turbomolecular pumps, with high impact resistance and the ability to mount TMP on portable equipment or moving parts of equipment. The lineup ranges from 50L/s to 2,400L/s class.

■Features of the TG50F adjustable-position composite molecular pump

・Free mounting position ・Compact size ・Energy saving ・Rapid startup ・Rapid vent stop possible ・Compatible with atmospheric entry ・Serial communication possible

■Applications

・Semiconductor manufacturing ・Electron gun exhaust, ion source exhaust ・FPD manufacturing ・Surface treatment, surface modification ・Manufacturing various electronic components ・Analysis and testing equipment ・Tube manufacturing, optical parts manufacturing ・Accelerators, radiation facilities, nuclear fusion research ・Heat treatment ・Research and development

  • Product

    Flexible posture composite molecular pump TG-F series

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1 Models of Flexible posture composite molecular pump TG-F series

Image Part Number Price (excluding tax) Startup time (min) Mass VG・ISO-R/CF (kg) Allowable auxiliary pressure (Pa / Torr) Maximum compression ratio N2 Maximum compression ratio H2 Maximum gas flow rate N2 (sccm) Recommended auxiliary pump (L/min) Pumping speed N2 (with protective wire mesh) (L/s) Pumping speed N2 (L/s) Pumping speed H2 (L/s) Intake flange Mounting position Ultimate pressure VG・ISO-R/CF (Torr) Ultimate pressure VG・ISO-R/CF (Pa) Stop time (min) Controller model
Flexible posture composite molecular pump TG-F series-Part Number-TG50F

TG50F

Available upon quote

1-1.5

4.2/6

1330 / 10

1.4×10^7

5×10^2

80

≧50

49

51

12

VG65 ISO-R63 CF63

Freely

<2.3×10^-8

<3×10^-6

1-1.5

TC64

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About Company Handling This Product

Response Rate

100.0%


Response Time

129.2hrs

Company Overview

Founded in Osaka, Japan in 1950, Osaka Vacuum, Ltd. is a manufacturer of vacuum pumps and systems that holds t...

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  • Japan

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