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  3. Porous Chucks
  4. Double-sided adsorption porous chuck (Aszac Co., Ltd.)
Double-sided adsorption porous chuck-Double-sided adsorption porous chuck
Double-sided adsorption porous chuck-Aszac Co., Ltd.

Double-sided adsorption porous chuck
Aszac Co., Ltd.

About This Product

For weight reduction, adsorption, and filters It has high breathability and excellent suction power. The small pore diameter grips the workpiece evenly and prevents distortion. Porous ceramics are ceramics that have countless pores inside. Porous material has low thermal conductivity and is lightweight. Mainly used for filters, bubblers, vacuum chucks, air blowers, etc. There are two types: alumina type and SiC type. It can be used depending on the purpose and use.

■Porous alumina ceramics

A porous ceramic whose main component is alumina. It is a relatively inexpensive material with a good balance of thermal and mechanical properties. It weighs about half that of dense alumina and has a heat resistance temperature of 600℃ to 1600℃. We offer 6 types of materials depending on breathability and color.

■Porous SiC ceramics

A porous ceramic whose main component is SiC. Can be used in environments that alumina cannot handle (quick cooling, rapid heating, use of hydrofluoric acid-based chemicals, loads). It weighs about half that of dense SiC and has a heat resistance temperature of 1400℃ to 1600℃. It has the characteristics of being relatively hard to bend and dissipating heat easily. Two types of materials are available depending on breathability.

■Features

・Adsorption surface can be used differently ・Can be used for backup ・You can try two types of porosity.

■Purpose/Usage

・Porous vacuum chuck - Lighter components (specific gravity: lighter than aluminum) ・Insulation/heat dissipation plate ・Setter for firing ・Gas filter ・Member to prevent film peeling in film forming equipment, etc. ・For the purpose of floating the workpiece ・As a catalyst for deodorization, dust collection, filtration, and water purification ・As a low dielectric material

  • Product

    Double-sided adsorption porous chuck

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1 Models of Double-sided adsorption porous chuck

Image Part Number Price (excluding tax) Purpose Material
Double-sided adsorption porous chuck-Part Number-Double-sided adsorption porous chuck

Double-sided adsorption porous chuck

Available upon quote

Adsorption of thin films and wafers

Surface: Porous AZP60
Back: Porous AZPS40
Base material: Alsima L

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About Company Handling This Product

Aszac Co., Ltd.

  • Japan

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Porous Chucks
Porous Chucks　Aszac Co., Ltd.
Aszac Co., Ltd.

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