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  1. Metoree
  2. Semiconductor Manufacturing
  3. Bernoulli Chucks
  4. PeriZac® standard suction hand with 3 mm circumference (Aszac Co., Ltd.)
PeriZac® standard suction hand with 3 mm circumference-PeriZac® standard adsorption type hand with outer circumference of 3 mm
PeriZac® standard suction hand with 3 mm circumference-Aszac Co., Ltd.

PeriZac® standard suction hand with 3 mm circumference
Aszac Co., Ltd.

Aszac Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

61.1hours

About This Product

■Ceramic conveyor hand for atmospheric use that minimizes the risk of particle generation

There are many requests for materials that are lighter, stronger, and less flexible for end effectors (hand parts of transfer robots) in semiconductor manufacturing equipment. Processes that handle many wafers at once require loading the wafers into a slit with low clearance, and thinner ceramic end effectors are used. A transfer hand (end effector) equipped with a suction mechanism must have an internal flow path, but SUS pasting using adhesive increases the risk of foreign matter contamination. Ceramic suction and conveyance hands made with our integrated cavity technology, which eliminates the risk of metal contamination and particle contamination, have become the industry standard. PeriZac further reduces particles by carefully adjusting the contact area and position of the wafer and gently holding the outer periphery where circuits are not built. This product is for semiconductor device manufacturers aiming to improve yield. PeriZac is a coined word from Peripheral +ASUZAC.

■Features

・Suppresses the generation of particles from the bevel part and back surface that are generated during transportation or contact. ・Uses a material for the guide that does not easily damage the wafer ・Athzac's proprietary cavity integrated technology that does not use adhesive allows for thinning. ・Available for processing mounting holes and changing root length and width ・Supports options such as sensor installation ・Atmospheric specification hand

■What is a transport hand?

Used to move silicon wafers in and out of cassettes and process chambers using robots. Ceramics are used because they reduce deflection due to their high strength, are resistant to high temperature environments, and are used to solve problems such as metal contamination and dust generation.

  • Product

    PeriZac® standard suction hand with 3 mm circumference

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1 Models of PeriZac® standard suction hand with 3 mm circumference

Image Part Number Price (excluding tax) Purpose Material
PeriZac® standard suction hand with 3 mm circumference-Part Number-PeriZac® standard adsorption type hand with outer circumference of 3 mm

PeriZac® standard adsorption type hand with outer circumference of 3 mm

Available upon quote

For wafer transport (atmosphere)

Alumina

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About Company Handling This Product

Aszac Co., Ltd.

Response Rate

100.0%

Response Time

61.1hrs

  • Japan

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