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  1. Metoree
  2. Semiconductor Manufacturing
  3. Bernoulli Chucks
  4. Ceramics floating standard hand Bernoulli hand LeviZac® (Aszac Co., Ltd.)
Ceramics floating standard hand Bernoulli hand LeviZac®-Bernoulli hand LeviZac®
Ceramics floating standard hand Bernoulli hand LeviZac®-Aszac Co., Ltd.

Ceramics floating standard hand Bernoulli hand LeviZac®
Aszac Co., Ltd.

Aszac Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

61.1hours

About This Product

■What is Bernoulli hand (LeviZac®)?

In the semiconductor manufacturing process, wafer patterns are becoming increasingly finer. Demand for non-contact hands is increasing as a solution to eliminating adsorption marks, damage, and particles on wafers. Therefore, we have developed an original Bernoulli hand made of ceramics. This is a hand that suctions and holds wafers with its unique shape of air holes. It is possible to hold the wafer within 3mm of its outer circumference, reducing damage to the wafer and suppressing the generation of particles due to contact with the guide. Compared to metal hands, it has higher strength and superior chemical and heat resistance. ESD and particle countermeasures are also available as options.

■Features

・You can change the number and position of the air holes. ・Can transport warped wafers ・Suppresses particle generation due to contact with guide ・Durability is improved with integrated cavity technology that does not use adhesive to form flow channels.

■What is a transport hand?

Used to move silicon wafers in and out of cassettes and process chambers using robots. Ceramics are used because they reduce deflection due to their high strength, are resistant to high temperature environments, and are used to solve problems such as metal contamination and dust generation.

  • Product

    Ceramics floating standard hand Bernoulli hand LeviZac®

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1 Models of Ceramics floating standard hand Bernoulli hand LeviZac®

Image Part Number Price (excluding tax) Purpose Material
Ceramics floating standard hand Bernoulli hand LeviZac®-Part Number-Bernoulli hand LeviZac®

Bernoulli hand LeviZac®

Available upon quote

For wafer transport (atmosphere)

Alumina

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About Company Handling This Product

Aszac Co., Ltd.

Response Rate

100.0%

Response Time

61.1hrs

  • Japan

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Bernoulli Chucks
Bernoulli Chucks　Aszac Co., Ltd.
Aszac Co., Ltd.

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