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Carbon products Glassy carbon, a carbon material with excellent chemical and corrosion resistance-Glassy carbon
Carbon products Glassy carbon, a carbon material with excellent chemical and corrosion resistance-M.WATANABE & CO.,LTD.

Carbon products Glassy carbon, a carbon material with excellent chemical and corrosion resistance
M.WATANABE & CO.,LTD.

M.WATANABE & CO.,LTD.'s Response Status

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About This Product

Glassy carbon is a type of carbon material that has been used in parts for semiconductor manufacturing equipment. High purity is also possible.

■Basic information

Glassy carbon has the characteristics of general carbon materials, such as chemical resistance, corrosion resistance, heat resistance, and electrical conductivity, as well as gas and liquid impermeability, isotropy, acid resistance, and no dust generation. It has such characteristics. High purity is also possible by performing special treatment during the manufacturing process. Because of these excellent features, it is mainly used as a component for semiconductor manufacturing equipment. Glassy carbon beads are a true spherical carbon material with a smooth surface that can be used as a pore-forming material for fillers and ceramics, etc. It also has the characteristics of glassy carbon with air permeability and liquid permeability, and is used for vacuum chucks, etc. We also have porous glassy carbon that has a proven track record.

■Common characteristics of glassy carbon

・Chemical resistance, corrosion resistance, heat resistance, conductivity, no dust generation ・Gas/liquid impermeability ・High purity (high purity can be achieved by special treatment during the manufacturing process) ・High heat resistance, high X-ray transparency

■Characteristics of glassy carbon beads

・A true spherical carbon material with a smooth surface that can be used as a pore-forming material for fillers, ceramics, etc. ・Low thermal expansion, resistant to thermal shock ・Dense isotropic structure with no pores ・Center particle size 100μm, 200μm

■Characteristics of porous glassy carbon

・In addition to the characteristics of glassy carbon, it also has breathability and liquid permeability. ・Proven track record of use in vacuum chuck applications, etc.

■Main uses

・Materials for plasma etching and CVD equipment ・Sputtering target ・High purity chemical resistant parts ・Parts for analysis equipment ・Parts for X-ray equipment ・Pore forming material (glassy carbon beads) ・Filler (glassy carbon beads) ・Vacuum chuck parts (porous glassy carbon) ・Various filters (porous glassy carbon) ・Gas diffusion member (porous glassy carbon)

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    Carbon products Glassy carbon, a carbon material with excellent chemical and corrosion resistance

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1 Models of Carbon products Glassy carbon, a carbon material with excellent chemical and corrosion resistance

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Carbon products Glassy carbon, a carbon material with excellent chemical and corrosion resistance-Part Number-Glassy carbon

Glassy carbon

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About Company Handling This Product

Response Rate

100.0%


Response Time

60.5hrs

Company Overview

M.Watanabe Co., Ltd., founded in 1953 with headquarters in Koga City, Japan, is a manufacturer of semiconducto...

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