Exposure machine related parts SEMI standard compliant SMIF POD (multi/single type)
M.WATANABE & CO.,LTD.
About This Product
The reticle is protected by thorough electrostatic countermeasures and a unique mechanism minimizes the risk of reticle wear and damage due to mechanical shock during handling.
SMIF POD (Multi/Single type) is used to protect the reticle during the lithography process in the semiconductor front-end process.
■Basic information
The basic components are metal, and it has extremely high durability compared to resin SMIF PODs. The metal multi-reticle cassette is designed with thorough electrostatic countermeasures in mind and strong protection of the reticle. Stiffness and durability are essential for safe handling of reticles with pre-conditioned handling systems. All contact points with the reticle are made of plastic to minimize chrome wear and reticle shattering. The highly polished black finish is effective for particle detection in BrightLight inspection systems.
■Features
- Enhanced rigidity and durability. Since it is made of metal, it has stronger rigidity and durability compared to conventional resin products.
-Linerless design with low dust generation and easy cleaning. Compatible with 365nm, 248nm, and 193nm reticles (no phosphate additives in plastic)
・Approved by major exposure equipment manufacturers
・Suitable for ultrasonic cleaning and pure water cleaning equipment
・Suitable for hot air nozzle and radiant vacuum drying oven
・Maximum temperature during drying: 60℃ (uniform) Temperature during use: 18℃ to 30℃
■Applications
Used by device manufacturers in Japan and overseas.
-
Product
Exposure machine related parts SEMI standard compliant SMIF POD (multi/single type)
-
Handling Company
M.WATANABE & CO.,LTD.
-
Categories
1 Models of Exposure machine related parts SEMI standard compliant SMIF POD (multi/single type)
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
|
|
SMIF POD |
Available upon quote |
Customers who viewed this product also viewed
Other products of M.WATANABE & CO.,LTD.
View more products of M.WATANABE & CO.,LTD.
About Company Handling This Product
- Japan