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  4. Reduces particles in vacuum equipment Break filter for vacuum breaking (M.WATANABE & CO.,LTD.)
Reduces particles in vacuum equipment Break filter for vacuum breaking-Break Filter™
Reduces particles in vacuum equipment Break filter for vacuum breaking-M.WATANABE & CO.,LTD.

Reduces particles in vacuum equipment Break filter for vacuum breaking
M.WATANABE & CO.,LTD.

About This Product

Please try it to improve the throughput of vacuum equipment and reduce/prevent particles.

■Basic information

The Break Filter™, which was jointly developed by CoorsTek Ltd. and Tokyo Electron Ltd., utilizes the extremely fine pores of a porous ceramic material to provide high-performance vacuum breaking using the pressure buffer effect. It's a diffuser. Traditionally, slow venting, which slowly introduces nitrogen gas, has been used to break the vacuum in load-lock chambers to prevent particles from flying up. By attaching a Break Filter™ to the nitrogen gas outlet in the loadlock chamber, such slow vents are no longer necessary and throughput can be improved. At the same time, it is highly effective in reducing particles and is also highly effective in preventing sudden particles. It is also possible to expect even greater particle reduction effects when used in combination with slow vent.

■Features

-Improved throughput. By attaching a Break Filter™ to the nitrogen gas outlet in the load lock chamber, slow venting is no longer necessary and throughput can be improved. - Prevents particles from flying up. It is also highly effective in reducing particles, and is also highly effective in preventing sudden particles. ・Reduced venting time ・High corrosion resistance

■Applications/Examples of results

Diffuser for vacuum chamber

  • Product

    Reduces particles in vacuum equipment Break filter for vacuum breaking

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1 Models of Reduces particles in vacuum equipment Break filter for vacuum breaking

Image Part Number Price (excluding tax) Material
Reduces particles in vacuum equipment Break filter for vacuum breaking-Part Number-Break Filter™

Break Filter™

Available upon quote

Alumina porous material/Silica porous material

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About Company Handling This Product

M.WATANABE & CO.,LTD.

Company Overview

M.Watanabe Co., Ltd., founded in 1953 with headquarters in Koga City, Japan, is a manufacturer of semiconducto...

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  • Japan

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Vacuum Filters
Vacuum Filters　M.WATANABE & CO.,LTD.
M.WATANABE & CO.,LTD.

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