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  4. Ceramic products Achieving ultra-high purity, high heat resistance, and high wear resistance SiC dummy wafers (M.WATANABE & CO.,LTD.)
Ceramic products Achieving ultra-high purity, high heat resistance, and high wear resistance SiC dummy wafers-SiC dummy wafer
Ceramic products Achieving ultra-high purity, high heat resistance, and high wear resistance SiC dummy wafers-M.WATANABE & CO.,LTD.

Ceramic products Achieving ultra-high purity, high heat resistance, and high wear resistance SiC dummy wafers
M.WATANABE & CO.,LTD.

About This Product

Manufactured with proprietary CVD-SiC, it has the characteristics of ultra-high purity, high corrosion resistance, high oxidation resistance, high heat resistance, and high wear resistance.

■Basic information

SiC dummy wafers with ultra-high purity and excellent corrosion and heat resistance can be recycled for a long time and can be used in LP-CVD, high-temperature diffusion, and CMP processes. By using SiC dummy wafers for a long period of time, we can save on silicon wafers and reduce management time such as replacing and cleaning dummy wafers, contributing to cost reductions.

■Contributes to cost reduction

・Long-term recycling possible ・Ultra-high purity with excellent corrosion resistance and heat resistance ・Long-term use leads to savings in silicon wafers and reduction in management time such as replacing dummy wafers and cleaning.

■Features

・High purity (purity is ppm level) ・High oxidation resistance (can be used in oxidizing atmosphere for long periods) ・High corrosion resistance (deposited film and surface contamination can be removed only by wet cleaning) ・Low diffusion coefficient (difficult for surface contamination to diffuse inside SiC) ・Deposited film is difficult to peel off, contributing to particle reduction

■Main uses

・Dummy wafer for LP-CVD process ・Dummy wafer for high temperature diffusion process ・Dummy wafer for CMP process (for seasoning use)

  • Product

    Ceramic products Achieving ultra-high purity, high heat resistance, and high wear resistance SiC dummy wafers

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1 Models of Ceramic products Achieving ultra-high purity, high heat resistance, and high wear resistance SiC dummy wafers

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Ceramic products Achieving ultra-high purity, high heat resistance, and high wear resistance SiC dummy wafers-Part Number-SiC dummy wafer

SiC dummy wafer

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About Company Handling This Product

M.WATANABE & CO.,LTD.

Company Overview

M.Watanabe Co., Ltd., founded in 1953 with headquarters in Koga City, Japan, is a manufacturer of semiconducto...

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