Ceramic Products High Purity, High Strength, High Corrosion Resistance Silicon Carbide Ceramics (TPSS)
M.WATANABE & CO.,LTD.
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About This Product
Semiconductor-related materials that are essential for semiconductor manufacturing processes with high purity, high strength, and high corrosion resistance.
TPSS, whose main component is high-purity silicon carbide, is a semiconductor-related material developed using CoorsTek's proprietary technology. It is applied to core tubes for semiconductor heat treatment furnaces, soaking tubes, boats, forks, etc.
■Basic information
TPSS, whose main component is high-purity silicon carbide, is a semiconductor-related material developed using CoorsTek's proprietary technology. TPSS products have many properties such as high purity, high strength, and high corrosion resistance, and are used in furnace core tubes for semiconductor heat treatment furnaces, soaking tubes, boats, forks, etc. We also offer grades whose surfaces are coated with an ultra-high purity and dense silicon carbide film using the CVD method, meeting a wide range of user needs. Our wafer boats, which incorporate precision processing technology, have a particularly good reputation, contributing to quality and yield improvements in 300mm wafer processes.
■Materials
High purity reactive sintered silicon carbide TPSS
■Features
・Supports a wide range of user needs from high-temperature to low-temperature processes
・High purity, high strength, high corrosion resistance
・Can be used at high temperatures (~1,350℃)
・Suppress particle generation
■Applications
Semiconductor manufacturing process related products (furnace core tubes, soaking tubes, boats, thin tubes, insulation plates, parts, etc.)
■Delivery record
・Domestic semiconductor device manufacturer
・Domestic semiconductor manufacturing equipment manufacturer
・Domestic silicon wafer manufacturer
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Product
Ceramic Products High Purity, High Strength, High Corrosion Resistance Silicon Carbide Ceramics (TPSS)
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