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  4. Semiconductor manufacturing equipment Contributes to the reduction of chemicals and pure water Quartz tube cleaning equipment (HTC/VTC series) (M.WATANABE & CO.,LTD.)
Semiconductor manufacturing equipment Contributes to the reduction of chemicals and pure water Quartz tube cleaning equipment (HTC/VTC series)-HTC/VTC series
Semiconductor manufacturing equipment Contributes to the reduction of chemicals and pure water Quartz tube cleaning equipment (HTC/VTC series)-M.WATANABE & CO.,LTD.

Semiconductor manufacturing equipment Contributes to the reduction of chemicals and pure water Quartz tube cleaning equipment (HTC/VTC series)
M.WATANABE & CO.,LTD.

About This Product

Vertical cleaning equipment (VTC series) saves space and contributes to "reducing the use of chemical solutions and pure water." World-class delivery record (more than 400 units)

■Basic information

The "HTC/VTC" series is a quartz tube cleaning device designed to clean quartz tubes used in the diffusion process, CVD process, and annealing process. Compatible with 6, 8, and 12-inch process quartz tubes, we have a lineup of horizontal (HTC) and vertical (VTC) equipment to suit the shape and cleaning purpose of the quartz tube. In particular, the vertical type (VTC) uses a shower nozzle circulation filtering system with a turntable rotation mechanism, which saves space and contributes to the reduction of chemical solutions and pure water. We have a world-class delivery record (more than 400 units) to domestic and overseas semiconductor device manufacturers/silicon wafer manufacturers, and we will make the best proposal to meet your needs. Features

■Equipment lineup tailored to the shape and cleaning purpose of quartz tubes

・Supports 6-inch, 8-inch, and 12-inch process quartz tubes. ・Horizontal type (HTC) and vertical type (VTC) devices can be selected depending on the shape of the quartz tube and cleaning purpose.

■Contributes to “reducing chemical solutions and pure water” by saving space

Vertical type (VTC series) saves space and contributes to “reducing chemical solutions and pure water” Customization available

■World-class delivery record (more than 400 units)

World-class delivery record (more than 400 units) to domestic and overseas semiconductor device manufacturers/silicon wafer manufacturers

■Extensive experience handling related equipment

We also handle a variety of related equipment such as quartz boat cleaning equipment, quartz parts cleaning equipment, quartz storage, quartz transport carts, etc.

■Applications/Examples of results

・Providing established equipment based on a world-class delivery record ・By selecting between horizontal and vertical types, we can propose the optimal cleaning method that meets your needs. ・We have a large lineup of related equipment and can meet various requests. ・Can also be customized according to customer requests

  • Product

    Semiconductor manufacturing equipment Contributes to the reduction of chemicals and pure water Quartz tube cleaning equipment (HTC/VTC series)

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1 Models of Semiconductor manufacturing equipment Contributes to the reduction of chemicals and pure water Quartz tube cleaning equipment (HTC/VTC series)

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Semiconductor manufacturing equipment Contributes to the reduction of chemicals and pure water Quartz tube cleaning equipment (HTC/VTC series)-Part Number-HTC/VTC series

HTC/VTC series

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About Company Handling This Product

M.WATANABE & CO.,LTD.

Company Overview

M.Watanabe Co., Ltd., founded in 1953 with headquarters in Koga City, Japan, is a manufacturer of semiconducto...

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  • Japan

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Cleaning Systems　M.WATANABE & CO.,LTD.
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