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Semiconductor manufacturing equipment Continuous normal pressure CVD equipment for mass production of solar cells (AMAX1000S)-AMAX1000S
Semiconductor manufacturing equipment Continuous normal pressure CVD equipment for mass production of solar cells (AMAX1000S)-M.WATANABE & CO.,LTD.

Semiconductor manufacturing equipment Continuous normal pressure CVD equipment for mass production of solar cells (AMAX1000S)
M.WATANABE & CO.,LTD.

M.WATANABE & CO.,LTD.'s Response Status

Response Rate

100.0%

Response Time

60.5hours


About This Product

High productivity continuous atmospheric pressure CVD (APCVD) equipment for mass production of crystalline Si solar cells NSG (SiO2) /PSG/BSG film deposition AMAX1000S is a continuous atmospheric pressure CVD device (APCVD device) developed for solar cell manufacturing based on the track record of the "AMAX" series.

■Basic information

In order to enable mass production that meets the production needs of solar cells, it is equipped with a large dispersion head (gas nozzle) and an ultra-high speed double arm transport mechanism. Additionally, in order to handle thin wafers for solar cells, we have adopted a special wafer holder, lamp heating mechanism, multi-stage Bernoulli chuck, etc.

■Features

・Supports 156mm square/125mm square wafer ・High productivity of 1,500 sheets/h ・Suitable for thin wafers for solar cells

■Applications

・Hard mask for diffusion/implantation, sacrificial film (NSG) ・Passivation film (protective film/insulating film) (NSG) ・Source membrane for solid phase diffusion (BSG, PSG) / Cap membrane (NSG)

■Delivery record

Domestic and international solar cell manufacturers

  • Product

    Semiconductor manufacturing equipment Continuous normal pressure CVD equipment for mass production of solar cells (AMAX1000S)

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1 Models of Semiconductor manufacturing equipment Continuous normal pressure CVD equipment for mass production of solar cells (AMAX1000S)

Image Part Number Price (excluding tax) Device size (mm) Film forming temperature Gas type
Semiconductor manufacturing equipment Continuous normal pressure CVD equipment for mass production of solar cells (AMAX1000S)-Part Number-AMAX1000S

AMAX1000S

Available upon quote

1,860 (W) x 5,900 (D) x 2,100 (H)

~430℃

SiH4/O2 type (SiH4/PH3/B2H6/O2/N2)

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About Company Handling This Product

Response Rate

100.0%


Response Time

60.5hrs

Company Overview

M.Watanabe Co., Ltd., founded in 1953 with headquarters in Koga City, Japan, is a manufacturer of semiconducto...

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  • Japan

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