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  3. Vacuum Valves
  4. Achieving miniaturization with simple component configuration Square gate valve Small Size Rollcam Gate Valve (V-Tex Co., Ltd.)
Achieving miniaturization with simple component configuration Square gate valve Small Size Rollcam Gate Valve-Small Size Rollcam Gate Valve
Achieving miniaturization with simple component configuration Square gate valve Small Size Rollcam Gate Valve-V-Tex Co., Ltd.

Achieving miniaturization with simple component configuration Square gate valve Small Size Rollcam Gate Valve
V-Tex Co., Ltd.

About This Product

We can accommodate everything from standard 200mm and 300mm wafers to G8 and G10.5 glass substrates, as well as non-standard sizes, and any connection specifications. Based on our extensive experience, V-Tex can manufacture customized products from small lots to meet customer needs. About V-Tex square gate valve

■Features

・There are no metal-on-metal sliding parts inside the valve, which creates a vacuum. ・Compact and space-saving design due to its simple and minimum number of parts. ・Since the valve body sealing surface is vertical, the risk of foreign objects getting caught is minimized. ・The standard specification is a highly durable and maintenance-free design that can operate up to 1 million times. ・An O-ring is standard for the valve body seal. Contributes to cost reduction.

■Usage example of square gate valve

- Installed at the workpiece entrance/exit of the vacuum chamber. ・Square gate valve: Used as an entrance and exit for workpieces (wafers, glass substrates, etc.) and as a partition between the atmosphere and chambers and between chambers.

■Small Size Rollcam Gate Valve

・Non-sliding structure inside the vacuum: No grease inside the vacuum, particle-free ・Low price: Reduce the number of parts to the bare minimum to achieve low prices ・Long lifespan

  • Product

    Achieving miniaturization with simple component configuration Square gate valve Small Size Rollcam Gate Valve

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1 Models of Achieving miniaturization with simple component configuration Square gate valve Small Size Rollcam Gate Valve

Image Part Number Price (excluding tax) Opening/closing time Material Operating pressure Lifespan Compatible caliber Operating temperature Leak amount Others Option
Achieving miniaturization with simple component configuration Square gate valve Small Size Rollcam Gate Valve-Part Number-Small Size Rollcam Gate Valve

Small Size Rollcam Gate Valve

Available upon quote

1.0-3.0s

Body: Aluminum A5052
Valve body: Aluminum A5052
Sealing material: FKM
Bellows: AM350

0.45-0.55MPa

1 million times

16~50A

Main body/valve body: 90℃
Actuator：60℃

Main body: 4.0×10-11 [pa・m3/s]
Valve body: 1.3×10-10 [pa・m3/s]

Lock pin for maintaining reverse pressure

Change of main body and valve body material
Change of seal material
Addition of surface treatment

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V-Tex Co., Ltd.

  • Japan

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