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  2. Valves
  3. Vacuum Valves
  4. Realizes miniaturization with simple component configuration Square gate valve True L-Motion Gate Valve (V-Tex Co., Ltd.)
Realizes miniaturization with simple component configuration Square gate valve True L-Motion Gate Valve-True L-Motion Gate Valve
Realizes miniaturization with simple component configuration Square gate valve True L-Motion Gate Valve-V-Tex Co., Ltd.

Realizes miniaturization with simple component configuration Square gate valve True L-Motion Gate Valve
V-Tex Co., Ltd.

About This Product

We can accommodate everything from standard 200mm and 300mm wafers to G8 and G10.5 glass substrates, as well as non-standard sizes, and any connection specifications. Based on our extensive experience, V-Tex can manufacture customized products from small lots to meet customer needs. About V-Tex square gate valve

■Features

・There are no metal-on-metal sliding parts inside the valve, which creates a vacuum. ・Compact and space-saving design due to its simple and minimum number of parts. ・Since the valve body sealing surface is vertical, the risk of foreign objects getting caught is minimized. ・The standard specification is a highly durable and maintenance-free design that can operate up to 1 million times. ・An O-ring is standard for the valve body seal. Contributes to cost reduction.

■Usage example of square gate valve

- Installed at the workpiece entrance/exit of the vacuum chamber. ・Square gate valve: Used as an entrance and exit for workpieces (wafers, glass substrates, etc.) and as a partition between the atmosphere and chambers and between chambers.

■True L-Motion Gate Valve

・Suitable for miniaturizing semiconductor processes ・Low vibration: Realizes low vibration during OPEN/CLOSE operation ・Low particles: New mechanism achieves low dust generation

  • Product

    Realizes miniaturization with simple component configuration Square gate valve True L-Motion Gate Valve

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1 Models of Realizes miniaturization with simple component configuration Square gate valve True L-Motion Gate Valve

Image Part Number Price (excluding tax) Opening/closing time Material Operating pressure Lifespan Operating temperature Leak amount Option
Realizes miniaturization with simple component configuration Square gate valve True L-Motion Gate Valve-Part Number-True L-Motion Gate Valve

True L-Motion Gate Valve

Available upon quote

1.0-3.0s

Body: Aluminum A5052
Valve body: Aluminum A5052
Sealing material: FKM
Bellows: AM350

0.45-0.55MPa

1 million times

Main body/valve body: 90℃
Actuator：60℃

Main body: 4.0×10-11 [pa・m3/s]
Valve body: 1.3×10-10 [pa・m3/s]

Change of seal material
Addition of surface treatment

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V-Tex Co., Ltd.

  • Japan

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