Realizes miniaturization with simple component configuration Square gate valve True L-Motion Gate Valve
V-Tex Co., Ltd.
About This Product
We can accommodate everything from standard 200mm and 300mm wafers to G8 and G10.5 glass substrates, as well as non-standard sizes, and any connection specifications. Based on our extensive experience, V-Tex can manufacture customized products from small lots to meet customer needs.
About V-Tex square gate valve
■Features
・There are no metal-on-metal sliding parts inside the valve, which creates a vacuum.
・Compact and space-saving design due to its simple and minimum number of parts.
・Since the valve body sealing surface is vertical, the risk of foreign objects getting caught is minimized.
・The standard specification is a highly durable and maintenance-free design that can operate up to 1 million times.
・An O-ring is standard for the valve body seal. Contributes to cost reduction.
■Usage example of square gate valve
- Installed at the workpiece entrance/exit of the vacuum chamber.
・Square gate valve: Used as an entrance and exit for workpieces (wafers, glass substrates, etc.) and as a partition between the atmosphere and chambers and between chambers.
■True L-Motion Gate Valve
・Suitable for miniaturizing semiconductor processes
・Low vibration: Realizes low vibration during OPEN/CLOSE operation
・Low particles: New mechanism achieves low dust generation
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Product
Realizes miniaturization with simple component configuration Square gate valve True L-Motion Gate Valve
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Handling Company
V-Tex Co., Ltd.
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Categories
1 Models of Realizes miniaturization with simple component configuration Square gate valve True L-Motion Gate Valve
| Product Image | Part Number | Price (excluding tax) |
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True L-Motion Gate Valve |
Available upon quote |
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About Company Handling This Product
- Japan